12/14/2012	9:57:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	9:57:36 AM	Recipe started at 9:57 AM
12/14/2012	9:57:36 AM	Helium valve closed
12/14/2012	9:57:36 AM	H2 valve closed
12/14/2012	9:57:36 AM	BCl3 valve closed
12/14/2012	9:57:36 AM	PH3 valve closed
12/14/2012	9:57:36 AM	SiCl4 pre valve closed
12/14/2012	9:57:36 AM	SiCl4 post valve closed
12/14/2012	9:57:36 AM	Main Vac valve closed
12/14/2012	9:57:36 AM	Bypass valve closed
12/14/2012	9:57:36 AM	Bubbler valve closed
12/14/2012	9:57:36 AM	Helium MFC set to  0.000000
12/14/2012	9:57:36 AM	H2 MFC set to  0.000000
12/14/2012	9:57:36 AM	BCl3 MFC set to  0.000000
12/14/2012	9:57:36 AM	PH3 MFC set to  0.000000
12/14/2012	9:57:36 AM	SiCl4 MFC set to  0.000000
12/14/2012	9:57:36 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	9:57:36 AM	Tube furnace set to 0
12/14/2012	9:57:39 AM	H2 valve closed
12/14/2012	9:57:39 AM	BCl3 valve closed
12/14/2012	9:57:39 AM	PH3 valve closed
12/14/2012	9:57:39 AM	SiCl4 pre valve closed
12/14/2012	9:57:39 AM	SiCl4 post valve closed
12/14/2012	9:57:39 AM	Main Vac valve closed
12/14/2012	9:57:39 AM	Bypass valve closed
12/14/2012	9:57:39 AM	Bubbler valve closed
12/14/2012	9:57:40 AM	Helium valve opened
12/14/2012	9:57:40 AM	Helium MFC set to  500.000000
12/14/2012	9:57:40 AM	H2 MFC set to  0.000000
12/14/2012	9:57:40 AM	BCl3 MFC set to  0.000000
12/14/2012	9:57:40 AM	PH3 MFC set to  0.000000
12/14/2012	9:57:40 AM	SiCl4 MFC set to  0.000000
12/14/2012	9:57:40 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	9:57:40 AM	Tube furnace set to 0
12/14/2012	9:58:52 AM	Helium valve closed
12/14/2012	9:58:52 AM	H2 valve closed
12/14/2012	9:58:52 AM	BCl3 valve closed
12/14/2012	9:58:52 AM	PH3 valve closed
12/14/2012	9:58:52 AM	SiCl4 pre valve closed
12/14/2012	9:58:52 AM	SiCl4 post valve closed
12/14/2012	9:58:52 AM	Main Vac valve closed
12/14/2012	9:58:52 AM	Bypass valve closed
12/14/2012	9:58:52 AM	Bubbler valve closed
12/14/2012	9:58:52 AM	Helium MFC set to  0.000000
12/14/2012	9:58:52 AM	H2 MFC set to  0.000000
12/14/2012	9:58:52 AM	BCl3 MFC set to  0.000000
12/14/2012	9:58:52 AM	PH3 MFC set to  0.000000
12/14/2012	9:58:52 AM	SiCl4 MFC set to  0.000000
12/14/2012	9:58:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	9:58:52 AM	Tube furnace set to 0
12/14/2012	9:58:53 AM	Run finished at 9:58 AM
12/14/2012	9:58:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	10:10:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2012	10:10:19 AM	Recipe started at 10:10 AM
12/14/2012	10:10:19 AM	Helium valve closed
12/14/2012	10:10:19 AM	H2 valve closed
12/14/2012	10:10:19 AM	BCl3 valve closed
12/14/2012	10:10:19 AM	PH3 valve closed
12/14/2012	10:10:19 AM	SiCl4 pre valve closed
12/14/2012	10:10:19 AM	SiCl4 post valve closed
12/14/2012	10:10:19 AM	Main Vac valve closed
12/14/2012	10:10:19 AM	Bubbler valve closed
12/14/2012	10:10:19 AM	Bypass valve opened
12/14/2012	10:10:19 AM	Helium MFC set to  0.000000
12/14/2012	10:10:19 AM	H2 MFC set to  0.000000
12/14/2012	10:10:19 AM	BCl3 MFC set to  0.000000
12/14/2012	10:10:19 AM	PH3 MFC set to  0.000000
12/14/2012	10:10:19 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:10:19 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:10:19 AM	Tube furnace set to 0
12/14/2012	10:11:58 AM	Helium valve closed
12/14/2012	10:11:58 AM	H2 valve closed
12/14/2012	10:11:58 AM	BCl3 valve closed
12/14/2012	10:11:58 AM	PH3 valve closed
12/14/2012	10:11:58 AM	SiCl4 pre valve closed
12/14/2012	10:11:58 AM	SiCl4 post valve closed
12/14/2012	10:11:58 AM	Main Vac valve closed
12/14/2012	10:11:58 AM	Bubbler valve closed
12/14/2012	10:11:58 AM	Bypass valve opened
12/14/2012	10:11:58 AM	Helium MFC set to  0.000000
12/14/2012	10:11:58 AM	H2 MFC set to  0.000000
12/14/2012	10:11:58 AM	BCl3 MFC set to  0.000000
12/14/2012	10:11:58 AM	PH3 MFC set to  0.000000
12/14/2012	10:11:58 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:11:58 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:11:58 AM	Tube furnace set to 0
12/14/2012	10:12:58 AM	Helium valve closed
12/14/2012	10:12:58 AM	H2 valve closed
12/14/2012	10:12:58 AM	BCl3 valve closed
12/14/2012	10:12:58 AM	PH3 valve closed
12/14/2012	10:12:58 AM	SiCl4 pre valve closed
12/14/2012	10:12:58 AM	SiCl4 post valve closed
12/14/2012	10:12:58 AM	Bypass valve closed
12/14/2012	10:12:58 AM	Bubbler valve closed
12/14/2012	10:12:58 AM	Main Vac valve opened
12/14/2012	10:12:58 AM	Helium MFC set to  0.000000
12/14/2012	10:12:58 AM	H2 MFC set to  0.000000
12/14/2012	10:12:58 AM	BCl3 MFC set to  0.000000
12/14/2012	10:12:58 AM	PH3 MFC set to  0.000000
12/14/2012	10:12:58 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:12:58 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:12:59 AM	Tube furnace set to 0
12/14/2012	10:13:00 AM	Run finished at 10:13 AM
12/14/2012	10:13:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2012	10:13:36 AM	Tube furnace set to 200
12/14/2012	10:32:17 AM	Recipe started at 10:32 AM
12/14/2012	10:32:17 AM	Helium valve closed
12/14/2012	10:32:17 AM	H2 valve closed
12/14/2012	10:32:17 AM	BCl3 valve closed
12/14/2012	10:32:17 AM	PH3 valve closed
12/14/2012	10:32:17 AM	SiCl4 pre valve closed
12/14/2012	10:32:17 AM	SiCl4 post valve closed
12/14/2012	10:32:17 AM	Bypass valve closed
12/14/2012	10:32:17 AM	Bubbler valve closed
12/14/2012	10:32:17 AM	Main Vac valve opened
12/14/2012	10:32:17 AM	Helium MFC set to  0.000000
12/14/2012	10:32:17 AM	H2 MFC set to  0.000000
12/14/2012	10:32:17 AM	BCl3 MFC set to  0.000000
12/14/2012	10:32:17 AM	PH3 MFC set to  0.000000
12/14/2012	10:32:17 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:32:17 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:32:17 AM	Tube furnace set to 0
12/14/2012	10:32:47 AM	H2 valve closed
12/14/2012	10:32:47 AM	BCl3 valve closed
12/14/2012	10:32:47 AM	PH3 valve closed
12/14/2012	10:32:47 AM	SiCl4 pre valve closed
12/14/2012	10:32:47 AM	SiCl4 post valve closed
12/14/2012	10:32:47 AM	Bypass valve closed
12/14/2012	10:32:47 AM	Bubbler valve closed
12/14/2012	10:32:47 AM	Helium valve opened
12/14/2012	10:32:47 AM	Main Vac valve opened
12/14/2012	10:32:47 AM	Helium MFC set to  20.000000
12/14/2012	10:32:47 AM	H2 MFC set to  0.000000
12/14/2012	10:32:47 AM	BCl3 MFC set to  0.000000
12/14/2012	10:32:47 AM	PH3 MFC set to  0.000000
12/14/2012	10:32:47 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:32:47 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:32:48 AM	Tube furnace set to 0
12/14/2012	10:33:18 AM	Helium valve closed
12/14/2012	10:33:18 AM	H2 valve closed
12/14/2012	10:33:18 AM	BCl3 valve closed
12/14/2012	10:33:18 AM	PH3 valve closed
12/14/2012	10:33:18 AM	SiCl4 pre valve closed
12/14/2012	10:33:18 AM	SiCl4 post valve closed
12/14/2012	10:33:18 AM	Bypass valve closed
12/14/2012	10:33:18 AM	Bubbler valve closed
12/14/2012	10:33:18 AM	Main Vac valve opened
12/14/2012	10:33:18 AM	Helium MFC set to  0.000000
12/14/2012	10:33:18 AM	H2 MFC set to  0.000000
12/14/2012	10:33:18 AM	BCl3 MFC set to  0.000000
12/14/2012	10:33:18 AM	PH3 MFC set to  0.000000
12/14/2012	10:33:18 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:33:18 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:33:18 AM	Tube furnace set to 0
12/14/2012	10:33:48 AM	H2 valve closed
12/14/2012	10:33:48 AM	BCl3 valve closed
12/14/2012	10:33:48 AM	PH3 valve closed
12/14/2012	10:33:48 AM	SiCl4 pre valve closed
12/14/2012	10:33:48 AM	SiCl4 post valve closed
12/14/2012	10:33:48 AM	Bypass valve closed
12/14/2012	10:33:48 AM	Bubbler valve closed
12/14/2012	10:33:48 AM	Helium valve opened
12/14/2012	10:33:48 AM	Main Vac valve opened
12/14/2012	10:33:48 AM	Helium MFC set to  20.000000
12/14/2012	10:33:48 AM	H2 MFC set to  0.000000
12/14/2012	10:33:48 AM	BCl3 MFC set to  0.000000
12/14/2012	10:33:48 AM	PH3 MFC set to  0.000000
12/14/2012	10:33:48 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:33:48 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:33:48 AM	Tube furnace set to 0
12/14/2012	10:34:18 AM	Helium valve closed
12/14/2012	10:34:18 AM	H2 valve closed
12/14/2012	10:34:18 AM	BCl3 valve closed
12/14/2012	10:34:18 AM	PH3 valve closed
12/14/2012	10:34:18 AM	SiCl4 pre valve closed
12/14/2012	10:34:18 AM	SiCl4 post valve closed
12/14/2012	10:34:18 AM	Bypass valve closed
12/14/2012	10:34:18 AM	Bubbler valve closed
12/14/2012	10:34:18 AM	Main Vac valve opened
12/14/2012	10:34:18 AM	Helium MFC set to  0.000000
12/14/2012	10:34:18 AM	H2 MFC set to  0.000000
12/14/2012	10:34:18 AM	BCl3 MFC set to  0.000000
12/14/2012	10:34:18 AM	PH3 MFC set to  0.000000
12/14/2012	10:34:18 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:34:18 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:34:18 AM	Tube furnace set to 0
12/14/2012	10:34:48 AM	H2 valve closed
12/14/2012	10:34:48 AM	BCl3 valve closed
12/14/2012	10:34:48 AM	PH3 valve closed
12/14/2012	10:34:48 AM	SiCl4 pre valve closed
12/14/2012	10:34:48 AM	SiCl4 post valve closed
12/14/2012	10:34:48 AM	Bypass valve closed
12/14/2012	10:34:48 AM	Bubbler valve closed
12/14/2012	10:34:48 AM	Helium valve opened
12/14/2012	10:34:48 AM	Main Vac valve opened
12/14/2012	10:34:48 AM	Helium MFC set to  20.000000
12/14/2012	10:34:48 AM	H2 MFC set to  0.000000
12/14/2012	10:34:48 AM	BCl3 MFC set to  0.000000
12/14/2012	10:34:48 AM	PH3 MFC set to  0.000000
12/14/2012	10:34:48 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:34:48 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:34:48 AM	Tube furnace set to 0
12/14/2012	10:35:19 AM	Helium valve closed
12/14/2012	10:35:19 AM	H2 valve closed
12/14/2012	10:35:19 AM	BCl3 valve closed
12/14/2012	10:35:19 AM	PH3 valve closed
12/14/2012	10:35:19 AM	SiCl4 pre valve closed
12/14/2012	10:35:19 AM	SiCl4 post valve closed
12/14/2012	10:35:19 AM	Bypass valve closed
12/14/2012	10:35:19 AM	Bubbler valve closed
12/14/2012	10:35:19 AM	Main Vac valve opened
12/14/2012	10:35:19 AM	Helium MFC set to  0.000000
12/14/2012	10:35:19 AM	H2 MFC set to  0.000000
12/14/2012	10:35:19 AM	BCl3 MFC set to  0.000000
12/14/2012	10:35:19 AM	PH3 MFC set to  0.000000
12/14/2012	10:35:19 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:35:19 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:35:19 AM	Tube furnace set to 0
12/14/2012	10:35:49 AM	H2 valve closed
12/14/2012	10:35:49 AM	BCl3 valve closed
12/14/2012	10:35:49 AM	PH3 valve closed
12/14/2012	10:35:49 AM	SiCl4 pre valve closed
12/14/2012	10:35:49 AM	SiCl4 post valve closed
12/14/2012	10:35:49 AM	Bypass valve closed
12/14/2012	10:35:49 AM	Bubbler valve closed
12/14/2012	10:35:49 AM	Helium valve opened
12/14/2012	10:35:49 AM	Main Vac valve opened
12/14/2012	10:35:49 AM	Helium MFC set to  20.000000
12/14/2012	10:35:49 AM	H2 MFC set to  0.000000
12/14/2012	10:35:49 AM	BCl3 MFC set to  0.000000
12/14/2012	10:35:49 AM	PH3 MFC set to  0.000000
12/14/2012	10:35:49 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:35:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:35:49 AM	Tube furnace set to 0
12/14/2012	10:36:19 AM	Helium valve closed
12/14/2012	10:36:19 AM	H2 valve closed
12/14/2012	10:36:19 AM	BCl3 valve closed
12/14/2012	10:36:19 AM	PH3 valve closed
12/14/2012	10:36:19 AM	SiCl4 pre valve closed
12/14/2012	10:36:19 AM	SiCl4 post valve closed
12/14/2012	10:36:19 AM	Bypass valve closed
12/14/2012	10:36:19 AM	Bubbler valve closed
12/14/2012	10:36:19 AM	Main Vac valve opened
12/14/2012	10:36:19 AM	Helium MFC set to  0.000000
12/14/2012	10:36:19 AM	H2 MFC set to  0.000000
12/14/2012	10:36:19 AM	BCl3 MFC set to  0.000000
12/14/2012	10:36:19 AM	PH3 MFC set to  0.000000
12/14/2012	10:36:19 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:36:19 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:36:19 AM	Tube furnace set to 0
12/14/2012	10:36:49 AM	H2 valve closed
12/14/2012	10:36:49 AM	BCl3 valve closed
12/14/2012	10:36:49 AM	PH3 valve closed
12/14/2012	10:36:49 AM	SiCl4 pre valve closed
12/14/2012	10:36:49 AM	SiCl4 post valve closed
12/14/2012	10:36:49 AM	Bypass valve closed
12/14/2012	10:36:49 AM	Bubbler valve closed
12/14/2012	10:36:49 AM	Helium valve opened
12/14/2012	10:36:49 AM	Main Vac valve opened
12/14/2012	10:36:49 AM	Helium MFC set to  20.000000
12/14/2012	10:36:49 AM	H2 MFC set to  0.000000
12/14/2012	10:36:49 AM	BCl3 MFC set to  0.000000
12/14/2012	10:36:49 AM	PH3 MFC set to  0.000000
12/14/2012	10:36:49 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:36:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:36:49 AM	Tube furnace set to 0
12/14/2012	10:37:19 AM	Helium valve closed
12/14/2012	10:37:19 AM	H2 valve closed
12/14/2012	10:37:20 AM	BCl3 valve closed
12/14/2012	10:37:20 AM	PH3 valve closed
12/14/2012	10:37:20 AM	SiCl4 pre valve closed
12/14/2012	10:37:20 AM	SiCl4 post valve closed
12/14/2012	10:37:20 AM	Bypass valve closed
12/14/2012	10:37:20 AM	Bubbler valve closed
12/14/2012	10:37:20 AM	Main Vac valve opened
12/14/2012	10:37:20 AM	Helium MFC set to  0.000000
12/14/2012	10:37:20 AM	H2 MFC set to  0.000000
12/14/2012	10:37:20 AM	BCl3 MFC set to  0.000000
12/14/2012	10:37:20 AM	PH3 MFC set to  0.000000
12/14/2012	10:37:20 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:37:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:37:20 AM	Tube furnace set to 0
12/14/2012	10:37:50 AM	H2 valve closed
12/14/2012	10:37:50 AM	BCl3 valve closed
12/14/2012	10:37:50 AM	PH3 valve closed
12/14/2012	10:37:50 AM	SiCl4 pre valve closed
12/14/2012	10:37:50 AM	SiCl4 post valve closed
12/14/2012	10:37:50 AM	Bypass valve closed
12/14/2012	10:37:50 AM	Bubbler valve closed
12/14/2012	10:37:50 AM	Helium valve opened
12/14/2012	10:37:50 AM	Main Vac valve opened
12/14/2012	10:37:50 AM	Helium MFC set to  20.000000
12/14/2012	10:37:50 AM	H2 MFC set to  0.000000
12/14/2012	10:37:50 AM	BCl3 MFC set to  0.000000
12/14/2012	10:37:50 AM	PH3 MFC set to  0.000000
12/14/2012	10:37:50 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:37:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:37:50 AM	Tube furnace set to 0
12/14/2012	10:38:20 AM	Helium valve closed
12/14/2012	10:38:20 AM	H2 valve closed
12/14/2012	10:38:20 AM	BCl3 valve closed
12/14/2012	10:38:20 AM	PH3 valve closed
12/14/2012	10:38:20 AM	SiCl4 pre valve closed
12/14/2012	10:38:20 AM	SiCl4 post valve closed
12/14/2012	10:38:20 AM	Bypass valve closed
12/14/2012	10:38:20 AM	Bubbler valve closed
12/14/2012	10:38:20 AM	Main Vac valve opened
12/14/2012	10:38:20 AM	Helium MFC set to  0.000000
12/14/2012	10:38:20 AM	H2 MFC set to  0.000000
12/14/2012	10:38:20 AM	BCl3 MFC set to  0.000000
12/14/2012	10:38:20 AM	PH3 MFC set to  0.000000
12/14/2012	10:38:20 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:38:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:38:20 AM	Tube furnace set to 0
12/14/2012	10:38:50 AM	H2 valve closed
12/14/2012	10:38:50 AM	BCl3 valve closed
12/14/2012	10:38:50 AM	PH3 valve closed
12/14/2012	10:38:50 AM	SiCl4 pre valve closed
12/14/2012	10:38:50 AM	SiCl4 post valve closed
12/14/2012	10:38:50 AM	Bypass valve closed
12/14/2012	10:38:50 AM	Bubbler valve closed
12/14/2012	10:38:50 AM	Helium valve opened
12/14/2012	10:38:50 AM	Main Vac valve opened
12/14/2012	10:38:50 AM	Helium MFC set to  20.000000
12/14/2012	10:38:50 AM	H2 MFC set to  0.000000
12/14/2012	10:38:50 AM	BCl3 MFC set to  0.000000
12/14/2012	10:38:50 AM	PH3 MFC set to  0.000000
12/14/2012	10:38:50 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:38:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:38:50 AM	Tube furnace set to 0
12/14/2012	10:39:20 AM	Helium valve closed
12/14/2012	10:39:20 AM	H2 valve closed
12/14/2012	10:39:20 AM	BCl3 valve closed
12/14/2012	10:39:20 AM	PH3 valve closed
12/14/2012	10:39:20 AM	SiCl4 pre valve closed
12/14/2012	10:39:20 AM	SiCl4 post valve closed
12/14/2012	10:39:20 AM	Bypass valve closed
12/14/2012	10:39:21 AM	Bubbler valve closed
12/14/2012	10:39:21 AM	Main Vac valve opened
12/14/2012	10:39:21 AM	Helium MFC set to  0.000000
12/14/2012	10:39:21 AM	H2 MFC set to  0.000000
12/14/2012	10:39:21 AM	BCl3 MFC set to  0.000000
12/14/2012	10:39:21 AM	PH3 MFC set to  0.000000
12/14/2012	10:39:21 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:39:21 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:39:21 AM	Tube furnace set to 0
12/14/2012	10:39:51 AM	H2 valve closed
12/14/2012	10:39:51 AM	BCl3 valve closed
12/14/2012	10:39:51 AM	PH3 valve closed
12/14/2012	10:39:51 AM	SiCl4 pre valve closed
12/14/2012	10:39:51 AM	SiCl4 post valve closed
12/14/2012	10:39:51 AM	Bypass valve closed
12/14/2012	10:39:51 AM	Bubbler valve closed
12/14/2012	10:39:51 AM	Helium valve opened
12/14/2012	10:39:51 AM	Main Vac valve opened
12/14/2012	10:39:51 AM	Helium MFC set to  20.000000
12/14/2012	10:39:51 AM	H2 MFC set to  0.000000
12/14/2012	10:39:51 AM	BCl3 MFC set to  0.000000
12/14/2012	10:39:51 AM	PH3 MFC set to  0.000000
12/14/2012	10:39:51 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:39:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:39:51 AM	Tube furnace set to 0
12/14/2012	10:40:21 AM	Helium valve closed
12/14/2012	10:40:21 AM	H2 valve closed
12/14/2012	10:40:21 AM	BCl3 valve closed
12/14/2012	10:40:21 AM	PH3 valve closed
12/14/2012	10:40:21 AM	SiCl4 pre valve closed
12/14/2012	10:40:21 AM	SiCl4 post valve closed
12/14/2012	10:40:21 AM	Bypass valve closed
12/14/2012	10:40:21 AM	Bubbler valve closed
12/14/2012	10:40:21 AM	Main Vac valve opened
12/14/2012	10:40:21 AM	Helium MFC set to  0.000000
12/14/2012	10:40:21 AM	H2 MFC set to  0.000000
12/14/2012	10:40:21 AM	BCl3 MFC set to  0.000000
12/14/2012	10:40:21 AM	PH3 MFC set to  0.000000
12/14/2012	10:40:21 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:40:21 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:40:21 AM	Tube furnace set to 0
12/14/2012	10:40:51 AM	H2 valve closed
12/14/2012	10:40:51 AM	BCl3 valve closed
12/14/2012	10:40:51 AM	PH3 valve closed
12/14/2012	10:40:51 AM	SiCl4 pre valve closed
12/14/2012	10:40:51 AM	SiCl4 post valve closed
12/14/2012	10:40:51 AM	Bypass valve closed
12/14/2012	10:40:51 AM	Bubbler valve closed
12/14/2012	10:40:51 AM	Helium valve opened
12/14/2012	10:40:51 AM	Main Vac valve opened
12/14/2012	10:40:51 AM	Helium MFC set to  20.000000
12/14/2012	10:40:51 AM	H2 MFC set to  0.000000
12/14/2012	10:40:51 AM	BCl3 MFC set to  0.000000
12/14/2012	10:40:51 AM	PH3 MFC set to  0.000000
12/14/2012	10:40:51 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:40:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:40:51 AM	Tube furnace set to 0
12/14/2012	10:41:21 AM	Helium valve closed
12/14/2012	10:41:21 AM	H2 valve closed
12/14/2012	10:41:21 AM	BCl3 valve closed
12/14/2012	10:41:21 AM	PH3 valve closed
12/14/2012	10:41:21 AM	SiCl4 pre valve closed
12/14/2012	10:41:21 AM	SiCl4 post valve closed
12/14/2012	10:41:21 AM	Bypass valve closed
12/14/2012	10:41:21 AM	Bubbler valve closed
12/14/2012	10:41:21 AM	Main Vac valve opened
12/14/2012	10:41:21 AM	Helium MFC set to  0.000000
12/14/2012	10:41:21 AM	H2 MFC set to  0.000000
12/14/2012	10:41:21 AM	BCl3 MFC set to  0.000000
12/14/2012	10:41:21 AM	PH3 MFC set to  0.000000
12/14/2012	10:41:21 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:41:22 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:41:22 AM	Tube furnace set to 200
12/14/2012	10:41:52 AM	H2 valve closed
12/14/2012	10:41:52 AM	BCl3 valve closed
12/14/2012	10:41:52 AM	PH3 valve closed
12/14/2012	10:41:52 AM	SiCl4 pre valve closed
12/14/2012	10:41:52 AM	SiCl4 post valve closed
12/14/2012	10:41:52 AM	Bypass valve closed
12/14/2012	10:41:52 AM	Bubbler valve closed
12/14/2012	10:41:52 AM	Helium valve opened
12/14/2012	10:41:52 AM	Main Vac valve opened
12/14/2012	10:41:52 AM	Helium MFC set to  20.000000
12/14/2012	10:41:52 AM	H2 MFC set to  0.000000
12/14/2012	10:41:52 AM	BCl3 MFC set to  0.000000
12/14/2012	10:41:52 AM	PH3 MFC set to  0.000000
12/14/2012	10:41:52 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:41:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:41:52 AM	Tube furnace set to 200
12/14/2012	10:42:22 AM	Helium valve closed
12/14/2012	10:42:22 AM	H2 valve closed
12/14/2012	10:42:22 AM	BCl3 valve closed
12/14/2012	10:42:22 AM	PH3 valve closed
12/14/2012	10:42:22 AM	SiCl4 pre valve closed
12/14/2012	10:42:22 AM	SiCl4 post valve closed
12/14/2012	10:42:22 AM	Bypass valve closed
12/14/2012	10:42:22 AM	Bubbler valve closed
12/14/2012	10:42:22 AM	Main Vac valve opened
12/14/2012	10:42:22 AM	Helium MFC set to  0.000000
12/14/2012	10:42:22 AM	H2 MFC set to  0.000000
12/14/2012	10:42:22 AM	BCl3 MFC set to  0.000000
12/14/2012	10:42:22 AM	PH3 MFC set to  0.000000
12/14/2012	10:42:22 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:42:22 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:42:22 AM	Tube furnace set to 200
12/14/2012	10:42:52 AM	H2 valve closed
12/14/2012	10:42:52 AM	BCl3 valve closed
12/14/2012	10:42:52 AM	PH3 valve closed
12/14/2012	10:42:52 AM	SiCl4 pre valve closed
12/14/2012	10:42:52 AM	SiCl4 post valve closed
12/14/2012	10:42:52 AM	Bypass valve closed
12/14/2012	10:42:52 AM	Bubbler valve closed
12/14/2012	10:42:52 AM	Helium valve opened
12/14/2012	10:42:52 AM	Main Vac valve opened
12/14/2012	10:42:52 AM	Helium MFC set to  20.000000
12/14/2012	10:42:52 AM	H2 MFC set to  0.000000
12/14/2012	10:42:52 AM	BCl3 MFC set to  0.000000
12/14/2012	10:42:52 AM	PH3 MFC set to  0.000000
12/14/2012	10:42:52 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:42:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:42:52 AM	Tube furnace set to 200
12/14/2012	10:43:22 AM	Helium valve closed
12/14/2012	10:43:22 AM	H2 valve closed
12/14/2012	10:43:22 AM	BCl3 valve closed
12/14/2012	10:43:22 AM	PH3 valve closed
12/14/2012	10:43:22 AM	SiCl4 pre valve closed
12/14/2012	10:43:22 AM	SiCl4 post valve closed
12/14/2012	10:43:22 AM	Bypass valve closed
12/14/2012	10:43:22 AM	Bubbler valve closed
12/14/2012	10:43:22 AM	Main Vac valve opened
12/14/2012	10:43:22 AM	Helium MFC set to  0.000000
12/14/2012	10:43:22 AM	H2 MFC set to  0.000000
12/14/2012	10:43:22 AM	BCl3 MFC set to  0.000000
12/14/2012	10:43:22 AM	PH3 MFC set to  0.000000
12/14/2012	10:43:22 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:43:22 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:43:23 AM	Tube furnace set to 200
12/14/2012	10:43:53 AM	H2 valve closed
12/14/2012	10:43:53 AM	BCl3 valve closed
12/14/2012	10:43:53 AM	PH3 valve closed
12/14/2012	10:43:53 AM	SiCl4 pre valve closed
12/14/2012	10:43:53 AM	SiCl4 post valve closed
12/14/2012	10:43:53 AM	Bypass valve closed
12/14/2012	10:43:53 AM	Bubbler valve closed
12/14/2012	10:43:53 AM	Helium valve opened
12/14/2012	10:43:53 AM	Main Vac valve opened
12/14/2012	10:43:53 AM	Helium MFC set to  20.000000
12/14/2012	10:43:53 AM	H2 MFC set to  0.000000
12/14/2012	10:43:53 AM	BCl3 MFC set to  0.000000
12/14/2012	10:43:53 AM	PH3 MFC set to  0.000000
12/14/2012	10:43:53 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:43:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:43:53 AM	Tube furnace set to 200
12/14/2012	10:44:23 AM	Helium valve closed
12/14/2012	10:44:23 AM	H2 valve closed
12/14/2012	10:44:23 AM	BCl3 valve closed
12/14/2012	10:44:23 AM	PH3 valve closed
12/14/2012	10:44:23 AM	SiCl4 pre valve closed
12/14/2012	10:44:23 AM	SiCl4 post valve closed
12/14/2012	10:44:23 AM	Bypass valve closed
12/14/2012	10:44:23 AM	Bubbler valve closed
12/14/2012	10:44:23 AM	Main Vac valve opened
12/14/2012	10:44:23 AM	Helium MFC set to  0.000000
12/14/2012	10:44:23 AM	H2 MFC set to  0.000000
12/14/2012	10:44:23 AM	BCl3 MFC set to  0.000000
12/14/2012	10:44:23 AM	PH3 MFC set to  0.000000
12/14/2012	10:44:23 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:44:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:44:23 AM	Tube furnace set to 200
12/14/2012	10:44:53 AM	H2 valve closed
12/14/2012	10:44:53 AM	BCl3 valve closed
12/14/2012	10:44:53 AM	PH3 valve closed
12/14/2012	10:44:53 AM	SiCl4 pre valve closed
12/14/2012	10:44:53 AM	SiCl4 post valve closed
12/14/2012	10:44:53 AM	Bypass valve closed
12/14/2012	10:44:53 AM	Bubbler valve closed
12/14/2012	10:44:53 AM	Helium valve opened
12/14/2012	10:44:53 AM	Main Vac valve opened
12/14/2012	10:44:53 AM	Helium MFC set to  20.000000
12/14/2012	10:44:53 AM	H2 MFC set to  0.000000
12/14/2012	10:44:53 AM	BCl3 MFC set to  0.000000
12/14/2012	10:44:53 AM	PH3 MFC set to  0.000000
12/14/2012	10:44:53 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:44:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:44:53 AM	Tube furnace set to 200
12/14/2012	10:45:23 AM	Helium valve closed
12/14/2012	10:45:23 AM	H2 valve closed
12/14/2012	10:45:23 AM	BCl3 valve closed
12/14/2012	10:45:23 AM	PH3 valve closed
12/14/2012	10:45:23 AM	SiCl4 pre valve closed
12/14/2012	10:45:23 AM	SiCl4 post valve closed
12/14/2012	10:45:23 AM	Bypass valve closed
12/14/2012	10:45:23 AM	Bubbler valve closed
12/14/2012	10:45:23 AM	Main Vac valve opened
12/14/2012	10:45:23 AM	Helium MFC set to  0.000000
12/14/2012	10:45:23 AM	H2 MFC set to  0.000000
12/14/2012	10:45:23 AM	BCl3 MFC set to  0.000000
12/14/2012	10:45:23 AM	PH3 MFC set to  0.000000
12/14/2012	10:45:23 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:45:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:45:24 AM	Tube furnace set to 200
12/14/2012	10:45:54 AM	H2 valve closed
12/14/2012	10:45:54 AM	BCl3 valve closed
12/14/2012	10:45:54 AM	PH3 valve closed
12/14/2012	10:45:54 AM	SiCl4 pre valve closed
12/14/2012	10:45:54 AM	SiCl4 post valve closed
12/14/2012	10:45:54 AM	Bypass valve closed
12/14/2012	10:45:54 AM	Bubbler valve closed
12/14/2012	10:45:54 AM	Helium valve opened
12/14/2012	10:45:54 AM	Main Vac valve opened
12/14/2012	10:45:54 AM	Helium MFC set to  20.000000
12/14/2012	10:45:54 AM	H2 MFC set to  0.000000
12/14/2012	10:45:54 AM	BCl3 MFC set to  0.000000
12/14/2012	10:45:54 AM	PH3 MFC set to  0.000000
12/14/2012	10:45:54 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:45:54 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:45:54 AM	Tube furnace set to 200
12/14/2012	10:46:24 AM	Helium valve closed
12/14/2012	10:46:24 AM	H2 valve closed
12/14/2012	10:46:24 AM	BCl3 valve closed
12/14/2012	10:46:24 AM	PH3 valve closed
12/14/2012	10:46:24 AM	SiCl4 pre valve closed
12/14/2012	10:46:24 AM	SiCl4 post valve closed
12/14/2012	10:46:24 AM	Bypass valve closed
12/14/2012	10:46:24 AM	Bubbler valve closed
12/14/2012	10:46:24 AM	Main Vac valve opened
12/14/2012	10:46:24 AM	Helium MFC set to  0.000000
12/14/2012	10:46:24 AM	H2 MFC set to  0.000000
12/14/2012	10:46:24 AM	BCl3 MFC set to  0.000000
12/14/2012	10:46:24 AM	PH3 MFC set to  0.000000
12/14/2012	10:46:24 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:46:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:46:24 AM	Tube furnace set to 200
12/14/2012	10:46:54 AM	H2 valve closed
12/14/2012	10:46:54 AM	BCl3 valve closed
12/14/2012	10:46:54 AM	PH3 valve closed
12/14/2012	10:46:54 AM	SiCl4 pre valve closed
12/14/2012	10:46:54 AM	SiCl4 post valve closed
12/14/2012	10:46:54 AM	Bypass valve closed
12/14/2012	10:46:54 AM	Bubbler valve closed
12/14/2012	10:46:54 AM	Helium valve opened
12/14/2012	10:46:54 AM	Main Vac valve opened
12/14/2012	10:46:54 AM	Helium MFC set to  20.000000
12/14/2012	10:46:54 AM	H2 MFC set to  0.000000
12/14/2012	10:46:54 AM	BCl3 MFC set to  0.000000
12/14/2012	10:46:54 AM	PH3 MFC set to  0.000000
12/14/2012	10:46:54 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:46:54 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:46:54 AM	Tube furnace set to 200
12/14/2012	10:47:24 AM	Helium valve closed
12/14/2012	10:47:24 AM	H2 valve closed
12/14/2012	10:47:24 AM	BCl3 valve closed
12/14/2012	10:47:24 AM	PH3 valve closed
12/14/2012	10:47:24 AM	SiCl4 pre valve closed
12/14/2012	10:47:24 AM	SiCl4 post valve closed
12/14/2012	10:47:24 AM	Bypass valve closed
12/14/2012	10:47:24 AM	Bubbler valve closed
12/14/2012	10:47:24 AM	Main Vac valve opened
12/14/2012	10:47:24 AM	Helium MFC set to  0.000000
12/14/2012	10:47:24 AM	H2 MFC set to  0.000000
12/14/2012	10:47:24 AM	BCl3 MFC set to  0.000000
12/14/2012	10:47:24 AM	PH3 MFC set to  0.000000
12/14/2012	10:47:24 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:47:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:47:25 AM	Tube furnace set to 0
12/14/2012	10:47:26 AM	Run finished at 10:47 AM
12/14/2012	10:53:18 AM	Recipe started at 10:53 AM
12/14/2012	10:53:18 AM	Helium valve closed
12/14/2012	10:53:18 AM	H2 valve closed
12/14/2012	10:53:18 AM	BCl3 valve closed
12/14/2012	10:53:18 AM	PH3 valve closed
12/14/2012	10:53:18 AM	SiCl4 pre valve closed
12/14/2012	10:53:18 AM	SiCl4 post valve closed
12/14/2012	10:53:18 AM	Bypass valve closed
12/14/2012	10:53:18 AM	Bubbler valve closed
12/14/2012	10:53:18 AM	Main Vac valve opened
12/14/2012	10:53:18 AM	Helium MFC set to  0.000000
12/14/2012	10:53:18 AM	H2 MFC set to  0.000000
12/14/2012	10:53:18 AM	BCl3 MFC set to  0.000000
12/14/2012	10:53:18 AM	PH3 MFC set to  0.000000
12/14/2012	10:53:18 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:53:18 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:53:18 AM	Tube furnace set to 0
12/14/2012	10:53:48 AM	H2 valve closed
12/14/2012	10:53:48 AM	BCl3 valve closed
12/14/2012	10:53:48 AM	PH3 valve closed
12/14/2012	10:53:48 AM	SiCl4 pre valve closed
12/14/2012	10:53:48 AM	SiCl4 post valve closed
12/14/2012	10:53:48 AM	Bypass valve closed
12/14/2012	10:53:48 AM	Bubbler valve closed
12/14/2012	10:53:48 AM	Helium valve opened
12/14/2012	10:53:48 AM	Main Vac valve opened
12/14/2012	10:53:48 AM	Helium MFC set to  20.000000
12/14/2012	10:53:48 AM	H2 MFC set to  0.000000
12/14/2012	10:53:48 AM	BCl3 MFC set to  0.000000
12/14/2012	10:53:48 AM	PH3 MFC set to  0.000000
12/14/2012	10:53:48 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:53:48 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:53:48 AM	Tube furnace set to 0
12/14/2012	10:54:18 AM	Helium valve closed
12/14/2012	10:54:18 AM	H2 valve closed
12/14/2012	10:54:18 AM	BCl3 valve closed
12/14/2012	10:54:18 AM	PH3 valve closed
12/14/2012	10:54:18 AM	SiCl4 pre valve closed
12/14/2012	10:54:18 AM	SiCl4 post valve closed
12/14/2012	10:54:18 AM	Bypass valve closed
12/14/2012	10:54:18 AM	Bubbler valve closed
12/14/2012	10:54:18 AM	Main Vac valve opened
12/14/2012	10:54:18 AM	Helium MFC set to  0.000000
12/14/2012	10:54:18 AM	H2 MFC set to  0.000000
12/14/2012	10:54:18 AM	BCl3 MFC set to  0.000000
12/14/2012	10:54:18 AM	PH3 MFC set to  0.000000
12/14/2012	10:54:18 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:54:18 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:54:19 AM	Tube furnace set to 0
12/14/2012	10:54:49 AM	H2 valve closed
12/14/2012	10:54:49 AM	BCl3 valve closed
12/14/2012	10:54:49 AM	PH3 valve closed
12/14/2012	10:54:49 AM	SiCl4 pre valve closed
12/14/2012	10:54:49 AM	SiCl4 post valve closed
12/14/2012	10:54:49 AM	Bypass valve closed
12/14/2012	10:54:49 AM	Bubbler valve closed
12/14/2012	10:54:49 AM	Helium valve opened
12/14/2012	10:54:49 AM	Main Vac valve opened
12/14/2012	10:54:49 AM	Helium MFC set to  20.000000
12/14/2012	10:54:49 AM	H2 MFC set to  0.000000
12/14/2012	10:54:49 AM	BCl3 MFC set to  0.000000
12/14/2012	10:54:49 AM	PH3 MFC set to  0.000000
12/14/2012	10:54:49 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:54:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:54:49 AM	Tube furnace set to 0
12/14/2012	10:55:19 AM	Helium valve closed
12/14/2012	10:55:19 AM	H2 valve closed
12/14/2012	10:55:19 AM	BCl3 valve closed
12/14/2012	10:55:19 AM	PH3 valve closed
12/14/2012	10:55:19 AM	SiCl4 pre valve closed
12/14/2012	10:55:19 AM	SiCl4 post valve closed
12/14/2012	10:55:19 AM	Bypass valve closed
12/14/2012	10:55:19 AM	Bubbler valve closed
12/14/2012	10:55:19 AM	Main Vac valve opened
12/14/2012	10:55:19 AM	Helium MFC set to  0.000000
12/14/2012	10:55:19 AM	H2 MFC set to  0.000000
12/14/2012	10:55:19 AM	BCl3 MFC set to  0.000000
12/14/2012	10:55:19 AM	PH3 MFC set to  0.000000
12/14/2012	10:55:19 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:55:19 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:55:19 AM	Tube furnace set to 0
12/14/2012	10:55:49 AM	H2 valve closed
12/14/2012	10:55:49 AM	BCl3 valve closed
12/14/2012	10:55:49 AM	PH3 valve closed
12/14/2012	10:55:49 AM	SiCl4 pre valve closed
12/14/2012	10:55:49 AM	SiCl4 post valve closed
12/14/2012	10:55:49 AM	Bypass valve closed
12/14/2012	10:55:49 AM	Bubbler valve closed
12/14/2012	10:55:49 AM	Helium valve opened
12/14/2012	10:55:49 AM	Main Vac valve opened
12/14/2012	10:55:49 AM	Helium MFC set to  20.000000
12/14/2012	10:55:49 AM	H2 MFC set to  0.000000
12/14/2012	10:55:49 AM	BCl3 MFC set to  0.000000
12/14/2012	10:55:49 AM	PH3 MFC set to  0.000000
12/14/2012	10:55:49 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:55:49 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:55:49 AM	Tube furnace set to 0
12/14/2012	10:56:19 AM	Helium valve closed
12/14/2012	10:56:19 AM	H2 valve closed
12/14/2012	10:56:19 AM	BCl3 valve closed
12/14/2012	10:56:19 AM	PH3 valve closed
12/14/2012	10:56:19 AM	SiCl4 pre valve closed
12/14/2012	10:56:19 AM	SiCl4 post valve closed
12/14/2012	10:56:19 AM	Bypass valve closed
12/14/2012	10:56:19 AM	Bubbler valve closed
12/14/2012	10:56:19 AM	Main Vac valve opened
12/14/2012	10:56:19 AM	Helium MFC set to  0.000000
12/14/2012	10:56:19 AM	H2 MFC set to  0.000000
12/14/2012	10:56:19 AM	BCl3 MFC set to  0.000000
12/14/2012	10:56:19 AM	PH3 MFC set to  0.000000
12/14/2012	10:56:19 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:56:19 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:56:20 AM	Tube furnace set to 0
12/14/2012	10:56:50 AM	H2 valve closed
12/14/2012	10:56:50 AM	BCl3 valve closed
12/14/2012	10:56:50 AM	PH3 valve closed
12/14/2012	10:56:50 AM	SiCl4 pre valve closed
12/14/2012	10:56:50 AM	SiCl4 post valve closed
12/14/2012	10:56:50 AM	Bypass valve closed
12/14/2012	10:56:50 AM	Bubbler valve closed
12/14/2012	10:56:50 AM	Helium valve opened
12/14/2012	10:56:50 AM	Main Vac valve opened
12/14/2012	10:56:50 AM	Helium MFC set to  20.000000
12/14/2012	10:56:50 AM	H2 MFC set to  0.000000
12/14/2012	10:56:50 AM	BCl3 MFC set to  0.000000
12/14/2012	10:56:50 AM	PH3 MFC set to  0.000000
12/14/2012	10:56:50 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:56:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:56:50 AM	Tube furnace set to 0
12/14/2012	10:57:20 AM	Helium valve closed
12/14/2012	10:57:20 AM	H2 valve closed
12/14/2012	10:57:20 AM	BCl3 valve closed
12/14/2012	10:57:20 AM	PH3 valve closed
12/14/2012	10:57:20 AM	SiCl4 pre valve closed
12/14/2012	10:57:20 AM	SiCl4 post valve closed
12/14/2012	10:57:20 AM	Bypass valve closed
12/14/2012	10:57:20 AM	Bubbler valve closed
12/14/2012	10:57:20 AM	Main Vac valve opened
12/14/2012	10:57:20 AM	Helium MFC set to  0.000000
12/14/2012	10:57:20 AM	H2 MFC set to  0.000000
12/14/2012	10:57:20 AM	BCl3 MFC set to  0.000000
12/14/2012	10:57:20 AM	PH3 MFC set to  0.000000
12/14/2012	10:57:20 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:57:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:57:20 AM	Tube furnace set to 0
12/14/2012	10:57:50 AM	H2 valve closed
12/14/2012	10:57:50 AM	BCl3 valve closed
12/14/2012	10:57:50 AM	PH3 valve closed
12/14/2012	10:57:50 AM	SiCl4 pre valve closed
12/14/2012	10:57:50 AM	SiCl4 post valve closed
12/14/2012	10:57:50 AM	Bypass valve closed
12/14/2012	10:57:50 AM	Bubbler valve closed
12/14/2012	10:57:50 AM	Helium valve opened
12/14/2012	10:57:50 AM	Main Vac valve opened
12/14/2012	10:57:50 AM	Helium MFC set to  20.000000
12/14/2012	10:57:50 AM	H2 MFC set to  0.000000
12/14/2012	10:57:50 AM	BCl3 MFC set to  0.000000
12/14/2012	10:57:50 AM	PH3 MFC set to  0.000000
12/14/2012	10:57:50 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:57:50 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:57:50 AM	Tube furnace set to 0
12/14/2012	10:58:20 AM	Helium valve closed
12/14/2012	10:58:20 AM	H2 valve closed
12/14/2012	10:58:20 AM	BCl3 valve closed
12/14/2012	10:58:20 AM	PH3 valve closed
12/14/2012	10:58:20 AM	SiCl4 pre valve closed
12/14/2012	10:58:20 AM	SiCl4 post valve closed
12/14/2012	10:58:20 AM	Bypass valve closed
12/14/2012	10:58:20 AM	Bubbler valve closed
12/14/2012	10:58:20 AM	Main Vac valve opened
12/14/2012	10:58:20 AM	Helium MFC set to  0.000000
12/14/2012	10:58:20 AM	H2 MFC set to  0.000000
12/14/2012	10:58:20 AM	BCl3 MFC set to  0.000000
12/14/2012	10:58:20 AM	PH3 MFC set to  0.000000
12/14/2012	10:58:20 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:58:20 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:58:21 AM	Tube furnace set to 0
12/14/2012	10:58:51 AM	H2 valve closed
12/14/2012	10:58:51 AM	BCl3 valve closed
12/14/2012	10:58:51 AM	PH3 valve closed
12/14/2012	10:58:51 AM	SiCl4 pre valve closed
12/14/2012	10:58:51 AM	SiCl4 post valve closed
12/14/2012	10:58:51 AM	Bypass valve closed
12/14/2012	10:58:51 AM	Bubbler valve closed
12/14/2012	10:58:51 AM	Helium valve opened
12/14/2012	10:58:51 AM	Main Vac valve opened
12/14/2012	10:58:51 AM	Helium MFC set to  20.000000
12/14/2012	10:58:51 AM	H2 MFC set to  0.000000
12/14/2012	10:58:51 AM	BCl3 MFC set to  0.000000
12/14/2012	10:58:51 AM	PH3 MFC set to  0.000000
12/14/2012	10:58:51 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:58:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:58:51 AM	Tube furnace set to 0
12/14/2012	10:59:21 AM	Helium valve closed
12/14/2012	10:59:21 AM	H2 valve closed
12/14/2012	10:59:21 AM	BCl3 valve closed
12/14/2012	10:59:21 AM	PH3 valve closed
12/14/2012	10:59:21 AM	SiCl4 pre valve closed
12/14/2012	10:59:21 AM	SiCl4 post valve closed
12/14/2012	10:59:21 AM	Bypass valve closed
12/14/2012	10:59:21 AM	Bubbler valve closed
12/14/2012	10:59:21 AM	Main Vac valve opened
12/14/2012	10:59:21 AM	Helium MFC set to  0.000000
12/14/2012	10:59:21 AM	H2 MFC set to  0.000000
12/14/2012	10:59:21 AM	BCl3 MFC set to  0.000000
12/14/2012	10:59:21 AM	PH3 MFC set to  0.000000
12/14/2012	10:59:21 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:59:21 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:59:21 AM	Tube furnace set to 0
12/14/2012	10:59:51 AM	H2 valve closed
12/14/2012	10:59:51 AM	BCl3 valve closed
12/14/2012	10:59:51 AM	PH3 valve closed
12/14/2012	10:59:51 AM	SiCl4 pre valve closed
12/14/2012	10:59:51 AM	SiCl4 post valve closed
12/14/2012	10:59:51 AM	Bypass valve closed
12/14/2012	10:59:51 AM	Bubbler valve closed
12/14/2012	10:59:51 AM	Helium valve opened
12/14/2012	10:59:51 AM	Main Vac valve opened
12/14/2012	10:59:51 AM	Helium MFC set to  20.000000
12/14/2012	10:59:51 AM	H2 MFC set to  0.000000
12/14/2012	10:59:51 AM	BCl3 MFC set to  0.000000
12/14/2012	10:59:51 AM	PH3 MFC set to  0.000000
12/14/2012	10:59:51 AM	SiCl4 MFC set to  0.000000
12/14/2012	10:59:51 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:59:51 AM	Tube furnace set to 0
12/14/2012	11:00:21 AM	Helium valve closed
12/14/2012	11:00:21 AM	H2 valve closed
12/14/2012	11:00:21 AM	BCl3 valve closed
12/14/2012	11:00:21 AM	PH3 valve closed
12/14/2012	11:00:21 AM	SiCl4 pre valve closed
12/14/2012	11:00:21 AM	SiCl4 post valve closed
12/14/2012	11:00:21 AM	Bypass valve closed
12/14/2012	11:00:21 AM	Bubbler valve closed
12/14/2012	11:00:21 AM	Main Vac valve opened
12/14/2012	11:00:21 AM	Helium MFC set to  0.000000
12/14/2012	11:00:21 AM	H2 MFC set to  0.000000
12/14/2012	11:00:21 AM	BCl3 MFC set to  0.000000
12/14/2012	11:00:21 AM	PH3 MFC set to  0.000000
12/14/2012	11:00:21 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:00:21 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:00:22 AM	Tube furnace set to 0
12/14/2012	11:00:52 AM	H2 valve closed
12/14/2012	11:00:52 AM	BCl3 valve closed
12/14/2012	11:00:52 AM	PH3 valve closed
12/14/2012	11:00:52 AM	SiCl4 pre valve closed
12/14/2012	11:00:52 AM	SiCl4 post valve closed
12/14/2012	11:00:52 AM	Bypass valve closed
12/14/2012	11:00:52 AM	Bubbler valve closed
12/14/2012	11:00:52 AM	Helium valve opened
12/14/2012	11:00:52 AM	Main Vac valve opened
12/14/2012	11:00:52 AM	Helium MFC set to  20.000000
12/14/2012	11:00:52 AM	H2 MFC set to  0.000000
12/14/2012	11:00:52 AM	BCl3 MFC set to  0.000000
12/14/2012	11:00:52 AM	PH3 MFC set to  0.000000
12/14/2012	11:00:52 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:00:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:00:52 AM	Tube furnace set to 0
12/14/2012	11:01:22 AM	Helium valve closed
12/14/2012	11:01:22 AM	H2 valve closed
12/14/2012	11:01:22 AM	BCl3 valve closed
12/14/2012	11:01:22 AM	PH3 valve closed
12/14/2012	11:01:22 AM	SiCl4 pre valve closed
12/14/2012	11:01:22 AM	SiCl4 post valve closed
12/14/2012	11:01:22 AM	Bypass valve closed
12/14/2012	11:01:22 AM	Bubbler valve closed
12/14/2012	11:01:22 AM	Main Vac valve opened
12/14/2012	11:01:22 AM	Helium MFC set to  0.000000
12/14/2012	11:01:22 AM	H2 MFC set to  0.000000
12/14/2012	11:01:22 AM	BCl3 MFC set to  0.000000
12/14/2012	11:01:22 AM	PH3 MFC set to  0.000000
12/14/2012	11:01:22 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:01:22 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:01:22 AM	Tube furnace set to 0
12/14/2012	11:01:52 AM	H2 valve closed
12/14/2012	11:01:52 AM	BCl3 valve closed
12/14/2012	11:01:52 AM	PH3 valve closed
12/14/2012	11:01:52 AM	SiCl4 pre valve closed
12/14/2012	11:01:52 AM	SiCl4 post valve closed
12/14/2012	11:01:52 AM	Bypass valve closed
12/14/2012	11:01:52 AM	Bubbler valve closed
12/14/2012	11:01:52 AM	Helium valve opened
12/14/2012	11:01:52 AM	Main Vac valve opened
12/14/2012	11:01:52 AM	Helium MFC set to  20.000000
12/14/2012	11:01:52 AM	H2 MFC set to  0.000000
12/14/2012	11:01:52 AM	BCl3 MFC set to  0.000000
12/14/2012	11:01:52 AM	PH3 MFC set to  0.000000
12/14/2012	11:01:52 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:01:52 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:01:52 AM	Tube furnace set to 0
12/14/2012	11:02:22 AM	Helium valve closed
12/14/2012	11:02:22 AM	H2 valve closed
12/14/2012	11:02:22 AM	BCl3 valve closed
12/14/2012	11:02:22 AM	PH3 valve closed
12/14/2012	11:02:22 AM	SiCl4 pre valve closed
12/14/2012	11:02:22 AM	SiCl4 post valve closed
12/14/2012	11:02:22 AM	Bypass valve closed
12/14/2012	11:02:22 AM	Bubbler valve closed
12/14/2012	11:02:22 AM	Main Vac valve opened
12/14/2012	11:02:22 AM	Helium MFC set to  0.000000
12/14/2012	11:02:22 AM	H2 MFC set to  0.000000
12/14/2012	11:02:22 AM	BCl3 MFC set to  0.000000
12/14/2012	11:02:22 AM	PH3 MFC set to  0.000000
12/14/2012	11:02:22 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:02:22 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:02:23 AM	Tube furnace set to 200
12/14/2012	11:02:53 AM	H2 valve closed
12/14/2012	11:02:53 AM	BCl3 valve closed
12/14/2012	11:02:53 AM	PH3 valve closed
12/14/2012	11:02:53 AM	SiCl4 pre valve closed
12/14/2012	11:02:53 AM	SiCl4 post valve closed
12/14/2012	11:02:53 AM	Bypass valve closed
12/14/2012	11:02:53 AM	Bubbler valve closed
12/14/2012	11:02:53 AM	Helium valve opened
12/14/2012	11:02:53 AM	Main Vac valve opened
12/14/2012	11:02:53 AM	Helium MFC set to  20.000000
12/14/2012	11:02:53 AM	H2 MFC set to  0.000000
12/14/2012	11:02:53 AM	BCl3 MFC set to  0.000000
12/14/2012	11:02:53 AM	PH3 MFC set to  0.000000
12/14/2012	11:02:53 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:02:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:02:53 AM	Tube furnace set to 200
12/14/2012	11:03:23 AM	Helium valve closed
12/14/2012	11:03:23 AM	H2 valve closed
12/14/2012	11:03:23 AM	BCl3 valve closed
12/14/2012	11:03:23 AM	PH3 valve closed
12/14/2012	11:03:23 AM	SiCl4 pre valve closed
12/14/2012	11:03:23 AM	SiCl4 post valve closed
12/14/2012	11:03:23 AM	Bypass valve closed
12/14/2012	11:03:23 AM	Bubbler valve closed
12/14/2012	11:03:23 AM	Main Vac valve opened
12/14/2012	11:03:23 AM	Helium MFC set to  0.000000
12/14/2012	11:03:23 AM	H2 MFC set to  0.000000
12/14/2012	11:03:23 AM	BCl3 MFC set to  0.000000
12/14/2012	11:03:23 AM	PH3 MFC set to  0.000000
12/14/2012	11:03:23 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:03:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:03:23 AM	Tube furnace set to 200
12/14/2012	11:03:53 AM	H2 valve closed
12/14/2012	11:03:53 AM	BCl3 valve closed
12/14/2012	11:03:53 AM	PH3 valve closed
12/14/2012	11:03:53 AM	SiCl4 pre valve closed
12/14/2012	11:03:53 AM	SiCl4 post valve closed
12/14/2012	11:03:53 AM	Bypass valve closed
12/14/2012	11:03:53 AM	Bubbler valve closed
12/14/2012	11:03:53 AM	Helium valve opened
12/14/2012	11:03:53 AM	Main Vac valve opened
12/14/2012	11:03:53 AM	Helium MFC set to  20.000000
12/14/2012	11:03:53 AM	H2 MFC set to  0.000000
12/14/2012	11:03:53 AM	BCl3 MFC set to  0.000000
12/14/2012	11:03:53 AM	PH3 MFC set to  0.000000
12/14/2012	11:03:53 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:03:53 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:03:53 AM	Tube furnace set to 200
12/14/2012	11:04:23 AM	Helium valve closed
12/14/2012	11:04:23 AM	H2 valve closed
12/14/2012	11:04:23 AM	BCl3 valve closed
12/14/2012	11:04:23 AM	PH3 valve closed
12/14/2012	11:04:23 AM	SiCl4 pre valve closed
12/14/2012	11:04:23 AM	SiCl4 post valve closed
12/14/2012	11:04:23 AM	Bypass valve closed
12/14/2012	11:04:23 AM	Bubbler valve closed
12/14/2012	11:04:23 AM	Main Vac valve opened
12/14/2012	11:04:23 AM	Helium MFC set to  0.000000
12/14/2012	11:04:23 AM	H2 MFC set to  0.000000
12/14/2012	11:04:23 AM	BCl3 MFC set to  0.000000
12/14/2012	11:04:23 AM	PH3 MFC set to  0.000000
12/14/2012	11:04:23 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:04:23 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:04:24 AM	Tube furnace set to 200
12/14/2012	11:04:54 AM	H2 valve closed
12/14/2012	11:04:54 AM	BCl3 valve closed
12/14/2012	11:04:54 AM	PH3 valve closed
12/14/2012	11:04:54 AM	SiCl4 pre valve closed
12/14/2012	11:04:54 AM	SiCl4 post valve closed
12/14/2012	11:04:54 AM	Bypass valve closed
12/14/2012	11:04:54 AM	Bubbler valve closed
12/14/2012	11:04:54 AM	Helium valve opened
12/14/2012	11:04:54 AM	Main Vac valve opened
12/14/2012	11:04:54 AM	Helium MFC set to  20.000000
12/14/2012	11:04:54 AM	H2 MFC set to  0.000000
12/14/2012	11:04:54 AM	BCl3 MFC set to  0.000000
12/14/2012	11:04:54 AM	PH3 MFC set to  0.000000
12/14/2012	11:04:54 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:04:54 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:04:54 AM	Tube furnace set to 200
12/14/2012	11:05:24 AM	Helium valve closed
12/14/2012	11:05:24 AM	H2 valve closed
12/14/2012	11:05:24 AM	BCl3 valve closed
12/14/2012	11:05:24 AM	PH3 valve closed
12/14/2012	11:05:24 AM	SiCl4 pre valve closed
12/14/2012	11:05:24 AM	SiCl4 post valve closed
12/14/2012	11:05:24 AM	Bypass valve closed
12/14/2012	11:05:24 AM	Bubbler valve closed
12/14/2012	11:05:24 AM	Main Vac valve opened
12/14/2012	11:05:24 AM	Helium MFC set to  0.000000
12/14/2012	11:05:24 AM	H2 MFC set to  0.000000
12/14/2012	11:05:24 AM	BCl3 MFC set to  0.000000
12/14/2012	11:05:24 AM	PH3 MFC set to  0.000000
12/14/2012	11:05:24 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:05:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:05:24 AM	Tube furnace set to 200
12/14/2012	11:05:54 AM	H2 valve closed
12/14/2012	11:05:54 AM	BCl3 valve closed
12/14/2012	11:05:54 AM	PH3 valve closed
12/14/2012	11:05:54 AM	SiCl4 pre valve closed
12/14/2012	11:05:54 AM	SiCl4 post valve closed
12/14/2012	11:05:54 AM	Bypass valve closed
12/14/2012	11:05:54 AM	Bubbler valve closed
12/14/2012	11:05:54 AM	Helium valve opened
12/14/2012	11:05:54 AM	Main Vac valve opened
12/14/2012	11:05:54 AM	Helium MFC set to  20.000000
12/14/2012	11:05:54 AM	H2 MFC set to  0.000000
12/14/2012	11:05:54 AM	BCl3 MFC set to  0.000000
12/14/2012	11:05:54 AM	PH3 MFC set to  0.000000
12/14/2012	11:05:54 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:05:54 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:05:54 AM	Tube furnace set to 200
12/14/2012	11:06:24 AM	Helium valve closed
12/14/2012	11:06:24 AM	H2 valve closed
12/14/2012	11:06:24 AM	BCl3 valve closed
12/14/2012	11:06:24 AM	PH3 valve closed
12/14/2012	11:06:24 AM	SiCl4 pre valve closed
12/14/2012	11:06:24 AM	SiCl4 post valve closed
12/14/2012	11:06:24 AM	Bypass valve closed
12/14/2012	11:06:24 AM	Bubbler valve closed
12/14/2012	11:06:24 AM	Main Vac valve opened
12/14/2012	11:06:24 AM	Helium MFC set to  0.000000
12/14/2012	11:06:24 AM	H2 MFC set to  0.000000
12/14/2012	11:06:24 AM	BCl3 MFC set to  0.000000
12/14/2012	11:06:24 AM	PH3 MFC set to  0.000000
12/14/2012	11:06:24 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:06:24 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:06:24 AM	Tube furnace set to 200
12/14/2012	11:06:55 AM	H2 valve closed
12/14/2012	11:06:55 AM	BCl3 valve closed
12/14/2012	11:06:55 AM	PH3 valve closed
12/14/2012	11:06:55 AM	SiCl4 pre valve closed
12/14/2012	11:06:55 AM	SiCl4 post valve closed
12/14/2012	11:06:55 AM	Bypass valve closed
12/14/2012	11:06:55 AM	Bubbler valve closed
12/14/2012	11:06:55 AM	Helium valve opened
12/14/2012	11:06:55 AM	Main Vac valve opened
12/14/2012	11:06:55 AM	Helium MFC set to  20.000000
12/14/2012	11:06:55 AM	H2 MFC set to  0.000000
12/14/2012	11:06:55 AM	BCl3 MFC set to  0.000000
12/14/2012	11:06:55 AM	PH3 MFC set to  0.000000
12/14/2012	11:06:55 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:06:55 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:06:55 AM	Tube furnace set to 200
12/14/2012	11:07:25 AM	Helium valve closed
12/14/2012	11:07:25 AM	H2 valve closed
12/14/2012	11:07:25 AM	BCl3 valve closed
12/14/2012	11:07:25 AM	PH3 valve closed
12/14/2012	11:07:25 AM	SiCl4 pre valve closed
12/14/2012	11:07:25 AM	SiCl4 post valve closed
12/14/2012	11:07:25 AM	Bypass valve closed
12/14/2012	11:07:25 AM	Bubbler valve closed
12/14/2012	11:07:25 AM	Main Vac valve opened
12/14/2012	11:07:25 AM	Helium MFC set to  0.000000
12/14/2012	11:07:25 AM	H2 MFC set to  0.000000
12/14/2012	11:07:25 AM	BCl3 MFC set to  0.000000
12/14/2012	11:07:25 AM	PH3 MFC set to  0.000000
12/14/2012	11:07:25 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:07:25 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:07:25 AM	Tube furnace set to 200
12/14/2012	11:07:55 AM	H2 valve closed
12/14/2012	11:07:55 AM	BCl3 valve closed
12/14/2012	11:07:55 AM	PH3 valve closed
12/14/2012	11:07:55 AM	SiCl4 pre valve closed
12/14/2012	11:07:55 AM	SiCl4 post valve closed
12/14/2012	11:07:55 AM	Bypass valve closed
12/14/2012	11:07:55 AM	Bubbler valve closed
12/14/2012	11:07:55 AM	Helium valve opened
12/14/2012	11:07:55 AM	Main Vac valve opened
12/14/2012	11:07:55 AM	Helium MFC set to  20.000000
12/14/2012	11:07:55 AM	H2 MFC set to  0.000000
12/14/2012	11:07:55 AM	BCl3 MFC set to  0.000000
12/14/2012	11:07:55 AM	PH3 MFC set to  0.000000
12/14/2012	11:07:55 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:07:55 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:07:55 AM	Tube furnace set to 200
12/14/2012	11:08:25 AM	Helium valve closed
12/14/2012	11:08:25 AM	H2 valve closed
12/14/2012	11:08:25 AM	BCl3 valve closed
12/14/2012	11:08:25 AM	PH3 valve closed
12/14/2012	11:08:25 AM	SiCl4 pre valve closed
12/14/2012	11:08:25 AM	SiCl4 post valve closed
12/14/2012	11:08:25 AM	Bypass valve closed
12/14/2012	11:08:25 AM	Bubbler valve closed
12/14/2012	11:08:25 AM	Main Vac valve opened
12/14/2012	11:08:25 AM	Helium MFC set to  0.000000
12/14/2012	11:08:25 AM	H2 MFC set to  0.000000
12/14/2012	11:08:25 AM	BCl3 MFC set to  0.000000
12/14/2012	11:08:25 AM	PH3 MFC set to  0.000000
12/14/2012	11:08:25 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:08:25 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:08:26 AM	Tube furnace set to 0
12/14/2012	11:08:27 AM	Run finished at 11:08 AM
12/14/2012	11:15:42 AM	Main Vac valve closed
12/14/2012	11:15:55 AM	Main Vac valve opened
12/14/2012	11:18:31 AM	Recipe started at 11:18 AM
12/14/2012	11:18:31 AM	Helium valve closed
12/14/2012	11:18:31 AM	H2 valve closed
12/14/2012	11:18:31 AM	BCl3 valve closed
12/14/2012	11:18:31 AM	PH3 valve closed
12/14/2012	11:18:31 AM	SiCl4 pre valve closed
12/14/2012	11:18:31 AM	SiCl4 post valve closed
12/14/2012	11:18:31 AM	Main Vac valve closed
12/14/2012	11:18:31 AM	Bypass valve closed
12/14/2012	11:18:31 AM	Bubbler valve closed
12/14/2012	11:18:31 AM	Helium MFC set to  0.000000
12/14/2012	11:18:31 AM	H2 MFC set to  0.000000
12/14/2012	11:18:31 AM	BCl3 MFC set to  0.000000
12/14/2012	11:18:31 AM	PH3 MFC set to  0.000000
12/14/2012	11:18:31 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:18:31 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:18:31 AM	Tube furnace set to 0
12/14/2012	11:18:35 AM	Helium valve closed
12/14/2012	11:18:35 AM	BCl3 valve closed
12/14/2012	11:18:35 AM	PH3 valve closed
12/14/2012	11:18:35 AM	SiCl4 pre valve closed
12/14/2012	11:18:35 AM	SiCl4 post valve closed
12/14/2012	11:18:35 AM	Main Vac valve closed
12/14/2012	11:18:35 AM	Bypass valve closed
12/14/2012	11:18:35 AM	Bubbler valve closed
12/14/2012	11:18:35 AM	H2 valve opened
12/14/2012	11:18:35 AM	Helium MFC set to  0.000000
12/14/2012	11:18:35 AM	H2 MFC set to  500.000000
12/14/2012	11:18:35 AM	BCl3 MFC set to  0.000000
12/14/2012	11:18:35 AM	PH3 MFC set to  0.000000
12/14/2012	11:18:35 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:18:35 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:18:35 AM	Tube furnace set to 0
12/14/2012	11:19:46 AM	Helium valve closed
12/14/2012	11:19:46 AM	BCl3 valve closed
12/14/2012	11:19:47 AM	PH3 valve closed
12/14/2012	11:19:47 AM	SiCl4 pre valve closed
12/14/2012	11:19:47 AM	SiCl4 post valve closed
12/14/2012	11:19:47 AM	Main Vac valve closed
12/14/2012	11:19:47 AM	Bypass valve closed
12/14/2012	11:19:47 AM	H2 valve opened
12/14/2012	11:19:47 AM	Bubbler valve opened
12/14/2012	11:19:47 AM	Helium MFC set to  0.000000
12/14/2012	11:19:47 AM	H2 MFC set to  500.000000
12/14/2012	11:19:47 AM	BCl3 MFC set to  0.000000
12/14/2012	11:19:47 AM	PH3 MFC set to  0.000000
12/14/2012	11:19:47 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:19:47 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:19:47 AM	Tube furnace set to 0
12/14/2012	11:19:48 AM	Helium valve closed
12/14/2012	11:19:48 AM	BCl3 valve closed
12/14/2012	11:19:48 AM	PH3 valve closed
12/14/2012	11:19:48 AM	SiCl4 pre valve closed
12/14/2012	11:19:48 AM	SiCl4 post valve closed
12/14/2012	11:19:48 AM	Main Vac valve closed
12/14/2012	11:19:48 AM	Bypass valve closed
12/14/2012	11:19:48 AM	H2 valve opened
12/14/2012	11:19:48 AM	Bubbler valve opened
12/14/2012	11:19:48 AM	Helium MFC set to  0.000000
12/14/2012	11:19:48 AM	H2 MFC set to  500.000000
12/14/2012	11:19:48 AM	BCl3 MFC set to  0.000000
12/14/2012	11:19:48 AM	PH3 MFC set to  0.000000
12/14/2012	11:19:48 AM	SiCl4 MFC set to  0.000000
12/14/2012	11:19:48 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:19:48 AM	Tube furnace set to 1000
12/14/2012	11:39:48 AM	Helium valve closed
12/14/2012	11:39:48 AM	PH3 valve closed
12/14/2012	11:39:48 AM	Main Vac valve closed
12/14/2012	11:39:48 AM	Bypass valve closed
12/14/2012	11:39:48 AM	H2 valve opened
12/14/2012	11:39:48 AM	BCl3 valve opened
12/14/2012	11:39:48 AM	SiCl4 pre valve opened
12/14/2012	11:39:48 AM	SiCl4 post valve opened
12/14/2012	11:39:48 AM	Bubbler valve opened
12/14/2012	11:39:48 AM	Helium MFC set to  0.000000
12/14/2012	11:39:48 AM	H2 MFC set to  450.000000
12/14/2012	11:39:48 AM	BCl3 MFC set to  0.750000
12/14/2012	11:39:48 AM	PH3 MFC set to  0.000000
12/14/2012	11:39:48 AM	SiCl4 MFC set to  50.000000
12/14/2012	11:39:48 AM	Bypass solenoid MFC set to  0.000000
12/14/2012	11:39:48 AM	Tube furnace set to 1000
12/14/2012	12:30:28 PM	Helium valve closed
12/14/2012	12:30:28 PM	BCl3 valve closed
12/14/2012	12:30:28 PM	PH3 valve closed
12/14/2012	12:30:28 PM	SiCl4 pre valve closed
12/14/2012	12:30:28 PM	SiCl4 post valve closed
12/14/2012	12:30:28 PM	Main Vac valve closed
12/14/2012	12:30:28 PM	Bypass valve closed
12/14/2012	12:30:28 PM	H2 valve opened
12/14/2012	12:30:28 PM	Bubbler valve opened
12/14/2012	12:30:28 PM	Helium MFC set to  0.000000
12/14/2012	12:30:28 PM	H2 MFC set to  500.000000
12/14/2012	12:30:28 PM	BCl3 MFC set to  0.000000
12/14/2012	12:30:28 PM	PH3 MFC set to  0.000000
12/14/2012	12:30:28 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:30:28 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:30:28 PM	Tube furnace set to 950
12/14/2012	12:32:28 PM	Helium valve closed
12/14/2012	12:32:28 PM	BCl3 valve closed
12/14/2012	12:32:28 PM	PH3 valve closed
12/14/2012	12:32:28 PM	SiCl4 pre valve closed
12/14/2012	12:32:28 PM	SiCl4 post valve closed
12/14/2012	12:32:29 PM	Main Vac valve closed
12/14/2012	12:32:29 PM	Bypass valve closed
12/14/2012	12:32:29 PM	H2 valve opened
12/14/2012	12:32:29 PM	Bubbler valve opened
12/14/2012	12:32:29 PM	Helium MFC set to  0.000000
12/14/2012	12:32:29 PM	H2 MFC set to  500.000000
12/14/2012	12:32:29 PM	BCl3 MFC set to  0.000000
12/14/2012	12:32:29 PM	PH3 MFC set to  0.000000
12/14/2012	12:32:29 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:32:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:32:29 PM	Tube furnace set to 900
12/14/2012	12:34:29 PM	Helium valve closed
12/14/2012	12:34:29 PM	BCl3 valve closed
12/14/2012	12:34:29 PM	PH3 valve closed
12/14/2012	12:34:29 PM	SiCl4 pre valve closed
12/14/2012	12:34:29 PM	SiCl4 post valve closed
12/14/2012	12:34:29 PM	Main Vac valve closed
12/14/2012	12:34:29 PM	Bypass valve closed
12/14/2012	12:34:29 PM	H2 valve opened
12/14/2012	12:34:29 PM	Bubbler valve opened
12/14/2012	12:34:29 PM	Helium MFC set to  0.000000
12/14/2012	12:34:29 PM	H2 MFC set to  500.000000
12/14/2012	12:34:29 PM	BCl3 MFC set to  0.000000
12/14/2012	12:34:29 PM	PH3 MFC set to  0.000000
12/14/2012	12:34:29 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:34:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:34:29 PM	Tube furnace set to 850
12/14/2012	12:36:29 PM	H2 valve closed
12/14/2012	12:36:29 PM	BCl3 valve closed
12/14/2012	12:36:29 PM	PH3 valve closed
12/14/2012	12:36:29 PM	SiCl4 pre valve closed
12/14/2012	12:36:29 PM	SiCl4 post valve closed
12/14/2012	12:36:29 PM	Main Vac valve closed
12/14/2012	12:36:29 PM	Bypass valve closed
12/14/2012	12:36:29 PM	Helium valve opened
12/14/2012	12:36:29 PM	Bubbler valve opened
12/14/2012	12:36:29 PM	Helium MFC set to  500.000000
12/14/2012	12:36:29 PM	H2 MFC set to  0.000000
12/14/2012	12:36:29 PM	BCl3 MFC set to  0.000000
12/14/2012	12:36:29 PM	PH3 MFC set to  0.000000
12/14/2012	12:36:29 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:36:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:36:29 PM	Tube furnace set to 800
12/14/2012	12:38:29 PM	H2 valve closed
12/14/2012	12:38:29 PM	BCl3 valve closed
12/14/2012	12:38:29 PM	PH3 valve closed
12/14/2012	12:38:29 PM	SiCl4 pre valve closed
12/14/2012	12:38:29 PM	SiCl4 post valve closed
12/14/2012	12:38:29 PM	Main Vac valve closed
12/14/2012	12:38:29 PM	Bypass valve closed
12/14/2012	12:38:29 PM	Helium valve opened
12/14/2012	12:38:29 PM	Bubbler valve opened
12/14/2012	12:38:29 PM	Helium MFC set to  500.000000
12/14/2012	12:38:29 PM	H2 MFC set to  0.000000
12/14/2012	12:38:29 PM	BCl3 MFC set to  0.000000
12/14/2012	12:38:29 PM	PH3 MFC set to  0.000000
12/14/2012	12:38:29 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:38:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:38:29 PM	Tube furnace set to 750
12/14/2012	12:40:29 PM	H2 valve closed
12/14/2012	12:40:29 PM	BCl3 valve closed
12/14/2012	12:40:29 PM	PH3 valve closed
12/14/2012	12:40:29 PM	SiCl4 pre valve closed
12/14/2012	12:40:29 PM	SiCl4 post valve closed
12/14/2012	12:40:29 PM	Main Vac valve closed
12/14/2012	12:40:29 PM	Bypass valve closed
12/14/2012	12:40:29 PM	Helium valve opened
12/14/2012	12:40:29 PM	Bubbler valve opened
12/14/2012	12:40:29 PM	Helium MFC set to  500.000000
12/14/2012	12:40:29 PM	H2 MFC set to  0.000000
12/14/2012	12:40:29 PM	BCl3 MFC set to  0.000000
12/14/2012	12:40:29 PM	PH3 MFC set to  0.000000
12/14/2012	12:40:29 PM	SiCl4 MFC set to  0.000000
12/14/2012	12:40:29 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	12:40:30 PM	Tube furnace set to 0
12/14/2012	1:00:30 PM	Helium valve closed
12/14/2012	1:00:30 PM	H2 valve closed
12/14/2012	1:00:30 PM	BCl3 valve closed
12/14/2012	1:00:30 PM	PH3 valve closed
12/14/2012	1:00:30 PM	SiCl4 pre valve closed
12/14/2012	1:00:30 PM	SiCl4 post valve closed
12/14/2012	1:00:30 PM	Main Vac valve closed
12/14/2012	1:00:30 PM	Bypass valve closed
12/14/2012	1:00:30 PM	Bubbler valve closed
12/14/2012	1:00:30 PM	Helium MFC set to  0.000000
12/14/2012	1:00:30 PM	H2 MFC set to  0.000000
12/14/2012	1:00:30 PM	BCl3 MFC set to  0.000000
12/14/2012	1:00:30 PM	PH3 MFC set to  0.000000
12/14/2012	1:00:30 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:00:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:00:30 PM	Tube furnace set to 0
12/14/2012	1:00:31 PM	Helium valve closed
12/14/2012	1:00:31 PM	H2 valve closed
12/14/2012	1:00:31 PM	BCl3 valve closed
12/14/2012	1:00:31 PM	PH3 valve closed
12/14/2012	1:00:31 PM	SiCl4 pre valve closed
12/14/2012	1:00:31 PM	SiCl4 post valve closed
12/14/2012	1:00:31 PM	Main Vac valve closed
12/14/2012	1:00:31 PM	Bubbler valve closed
12/14/2012	1:00:31 PM	Bypass valve opened
12/14/2012	1:00:31 PM	Helium MFC set to  0.000000
12/14/2012	1:00:31 PM	H2 MFC set to  0.000000
12/14/2012	1:00:31 PM	BCl3 MFC set to  0.000000
12/14/2012	1:00:31 PM	PH3 MFC set to  0.000000
12/14/2012	1:00:31 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:00:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:00:31 PM	Tube furnace set to 0
12/14/2012	1:01:42 PM	Helium valve closed
12/14/2012	1:01:43 PM	H2 valve closed
12/14/2012	1:01:43 PM	BCl3 valve closed
12/14/2012	1:01:43 PM	PH3 valve closed
12/14/2012	1:01:43 PM	SiCl4 pre valve closed
12/14/2012	1:01:43 PM	SiCl4 post valve closed
12/14/2012	1:01:43 PM	Main Vac valve closed
12/14/2012	1:01:43 PM	Bubbler valve closed
12/14/2012	1:01:43 PM	Bypass valve opened
12/14/2012	1:01:43 PM	Helium MFC set to  0.000000
12/14/2012	1:01:43 PM	H2 MFC set to  0.000000
12/14/2012	1:01:43 PM	BCl3 MFC set to  0.000000
12/14/2012	1:01:43 PM	PH3 MFC set to  0.000000
12/14/2012	1:01:43 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:01:43 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:01:43 PM	Tube furnace set to 0
12/14/2012	1:02:43 PM	Helium valve closed
12/14/2012	1:02:43 PM	H2 valve closed
12/14/2012	1:02:43 PM	BCl3 valve closed
12/14/2012	1:02:43 PM	PH3 valve closed
12/14/2012	1:02:43 PM	SiCl4 pre valve closed
12/14/2012	1:02:43 PM	SiCl4 post valve closed
12/14/2012	1:02:43 PM	Bypass valve closed
12/14/2012	1:02:43 PM	Bubbler valve closed
12/14/2012	1:02:43 PM	Main Vac valve opened
12/14/2012	1:02:43 PM	Helium MFC set to  0.000000
12/14/2012	1:02:43 PM	H2 MFC set to  0.000000
12/14/2012	1:02:43 PM	BCl3 MFC set to  0.000000
12/14/2012	1:02:43 PM	PH3 MFC set to  0.000000
12/14/2012	1:02:43 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:02:43 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:02:43 PM	Tube furnace set to 0
12/14/2012	1:02:44 PM	Run finished at 1:02 PM
12/14/2012	1:07:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	1:07:05 PM	Recipe started at 1:07 PM
12/14/2012	1:07:05 PM	Helium valve closed
12/14/2012	1:07:05 PM	H2 valve closed
12/14/2012	1:07:05 PM	BCl3 valve closed
12/14/2012	1:07:05 PM	PH3 valve closed
12/14/2012	1:07:05 PM	SiCl4 pre valve closed
12/14/2012	1:07:05 PM	SiCl4 post valve closed
12/14/2012	1:07:05 PM	Main Vac valve closed
12/14/2012	1:07:05 PM	Bypass valve closed
12/14/2012	1:07:05 PM	Bubbler valve closed
12/14/2012	1:07:05 PM	Helium MFC set to  0.000000
12/14/2012	1:07:05 PM	H2 MFC set to  0.000000
12/14/2012	1:07:05 PM	BCl3 MFC set to  0.000000
12/14/2012	1:07:05 PM	PH3 MFC set to  0.000000
12/14/2012	1:07:05 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:07:05 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:07:06 PM	Tube furnace set to 0
12/14/2012	1:07:09 PM	H2 valve closed
12/14/2012	1:07:09 PM	BCl3 valve closed
12/14/2012	1:07:09 PM	PH3 valve closed
12/14/2012	1:07:09 PM	SiCl4 pre valve closed
12/14/2012	1:07:09 PM	SiCl4 post valve closed
12/14/2012	1:07:09 PM	Main Vac valve closed
12/14/2012	1:07:09 PM	Bypass valve closed
12/14/2012	1:07:09 PM	Bubbler valve closed
12/14/2012	1:07:09 PM	Helium valve opened
12/14/2012	1:07:09 PM	Helium MFC set to  500.000000
12/14/2012	1:07:09 PM	H2 MFC set to  0.000000
12/14/2012	1:07:09 PM	BCl3 MFC set to  0.000000
12/14/2012	1:07:09 PM	PH3 MFC set to  0.000000
12/14/2012	1:07:09 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:07:09 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:07:09 PM	Tube furnace set to 0
12/14/2012	1:08:18 PM	Helium valve closed
12/14/2012	1:08:18 PM	H2 valve closed
12/14/2012	1:08:18 PM	BCl3 valve closed
12/14/2012	1:08:18 PM	PH3 valve closed
12/14/2012	1:08:18 PM	SiCl4 pre valve closed
12/14/2012	1:08:18 PM	SiCl4 post valve closed
12/14/2012	1:08:18 PM	Main Vac valve closed
12/14/2012	1:08:18 PM	Bypass valve closed
12/14/2012	1:08:18 PM	Bubbler valve closed
12/14/2012	1:08:18 PM	Helium MFC set to  0.000000
12/14/2012	1:08:18 PM	H2 MFC set to  0.000000
12/14/2012	1:08:18 PM	BCl3 MFC set to  0.000000
12/14/2012	1:08:18 PM	PH3 MFC set to  0.000000
12/14/2012	1:08:18 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:08:18 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:08:18 PM	Tube furnace set to 0
12/14/2012	1:08:19 PM	Run finished at 1:08 PM
12/14/2012	1:08:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	1:15:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2012	1:15:49 PM	Recipe started at 1:15 PM
12/14/2012	1:15:49 PM	Helium valve closed
12/14/2012	1:15:49 PM	H2 valve closed
12/14/2012	1:15:49 PM	BCl3 valve closed
12/14/2012	1:15:49 PM	PH3 valve closed
12/14/2012	1:15:49 PM	SiCl4 pre valve closed
12/14/2012	1:15:49 PM	SiCl4 post valve closed
12/14/2012	1:15:49 PM	Main Vac valve closed
12/14/2012	1:15:49 PM	Bubbler valve closed
12/14/2012	1:15:49 PM	Bypass valve opened
12/14/2012	1:15:49 PM	Helium MFC set to  0.000000
12/14/2012	1:15:49 PM	H2 MFC set to  0.000000
12/14/2012	1:15:49 PM	BCl3 MFC set to  0.000000
12/14/2012	1:15:49 PM	PH3 MFC set to  0.000000
12/14/2012	1:15:49 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:15:49 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:15:49 PM	Tube furnace set to 0
12/14/2012	1:17:19 PM	Helium valve closed
12/14/2012	1:17:19 PM	H2 valve closed
12/14/2012	1:17:19 PM	BCl3 valve closed
12/14/2012	1:17:19 PM	PH3 valve closed
12/14/2012	1:17:19 PM	SiCl4 pre valve closed
12/14/2012	1:17:19 PM	SiCl4 post valve closed
12/14/2012	1:17:19 PM	Main Vac valve closed
12/14/2012	1:17:19 PM	Bubbler valve closed
12/14/2012	1:17:19 PM	Bypass valve opened
12/14/2012	1:17:19 PM	Helium MFC set to  0.000000
12/14/2012	1:17:20 PM	H2 MFC set to  0.000000
12/14/2012	1:17:20 PM	BCl3 MFC set to  0.000000
12/14/2012	1:17:20 PM	PH3 MFC set to  0.000000
12/14/2012	1:17:20 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:17:20 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:17:20 PM	Tube furnace set to 0
12/14/2012	1:18:20 PM	Helium valve closed
12/14/2012	1:18:20 PM	H2 valve closed
12/14/2012	1:18:20 PM	BCl3 valve closed
12/14/2012	1:18:20 PM	PH3 valve closed
12/14/2012	1:18:20 PM	SiCl4 pre valve closed
12/14/2012	1:18:20 PM	SiCl4 post valve closed
12/14/2012	1:18:20 PM	Bypass valve closed
12/14/2012	1:18:20 PM	Bubbler valve closed
12/14/2012	1:18:20 PM	Main Vac valve opened
12/14/2012	1:18:20 PM	Helium MFC set to  0.000000
12/14/2012	1:18:20 PM	H2 MFC set to  0.000000
12/14/2012	1:18:20 PM	BCl3 MFC set to  0.000000
12/14/2012	1:18:20 PM	PH3 MFC set to  0.000000
12/14/2012	1:18:20 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:18:20 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:18:20 PM	Tube furnace set to 0
12/14/2012	1:18:21 PM	Run finished at 1:18 PM
12/14/2012	1:18:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2012	1:26:01 PM	Recipe started at 1:25 PM
12/14/2012	1:26:01 PM	Helium valve closed
12/14/2012	1:26:01 PM	H2 valve closed
12/14/2012	1:26:01 PM	BCl3 valve closed
12/14/2012	1:26:01 PM	PH3 valve closed
12/14/2012	1:26:01 PM	SiCl4 pre valve closed
12/14/2012	1:26:01 PM	SiCl4 post valve closed
12/14/2012	1:26:01 PM	Bypass valve closed
12/14/2012	1:26:01 PM	Bubbler valve closed
12/14/2012	1:26:01 PM	Main Vac valve opened
12/14/2012	1:26:01 PM	Helium MFC set to  0.000000
12/14/2012	1:26:01 PM	H2 MFC set to  0.000000
12/14/2012	1:26:01 PM	BCl3 MFC set to  0.000000
12/14/2012	1:26:01 PM	PH3 MFC set to  0.000000
12/14/2012	1:26:01 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:26:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:26:01 PM	Tube furnace set to 0
12/14/2012	1:26:31 PM	H2 valve closed
12/14/2012	1:26:31 PM	BCl3 valve closed
12/14/2012	1:26:31 PM	PH3 valve closed
12/14/2012	1:26:31 PM	SiCl4 pre valve closed
12/14/2012	1:26:31 PM	SiCl4 post valve closed
12/14/2012	1:26:31 PM	Bypass valve closed
12/14/2012	1:26:31 PM	Bubbler valve closed
12/14/2012	1:26:31 PM	Helium valve opened
12/14/2012	1:26:31 PM	Main Vac valve opened
12/14/2012	1:26:31 PM	Helium MFC set to  20.000000
12/14/2012	1:26:31 PM	H2 MFC set to  0.000000
12/14/2012	1:26:31 PM	BCl3 MFC set to  0.000000
12/14/2012	1:26:31 PM	PH3 MFC set to  0.000000
12/14/2012	1:26:31 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:26:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:26:31 PM	Tube furnace set to 0
12/14/2012	1:27:01 PM	Helium valve closed
12/14/2012	1:27:01 PM	H2 valve closed
12/14/2012	1:27:01 PM	BCl3 valve closed
12/14/2012	1:27:01 PM	PH3 valve closed
12/14/2012	1:27:01 PM	SiCl4 pre valve closed
12/14/2012	1:27:01 PM	SiCl4 post valve closed
12/14/2012	1:27:01 PM	Bypass valve closed
12/14/2012	1:27:01 PM	Bubbler valve closed
12/14/2012	1:27:01 PM	Main Vac valve opened
12/14/2012	1:27:01 PM	Helium MFC set to  0.000000
12/14/2012	1:27:01 PM	H2 MFC set to  0.000000
12/14/2012	1:27:01 PM	BCl3 MFC set to  0.000000
12/14/2012	1:27:01 PM	PH3 MFC set to  0.000000
12/14/2012	1:27:01 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:27:01 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:27:01 PM	Tube furnace set to 0
12/14/2012	1:27:31 PM	H2 valve closed
12/14/2012	1:27:31 PM	BCl3 valve closed
12/14/2012	1:27:31 PM	PH3 valve closed
12/14/2012	1:27:31 PM	SiCl4 pre valve closed
12/14/2012	1:27:31 PM	SiCl4 post valve closed
12/14/2012	1:27:31 PM	Bypass valve closed
12/14/2012	1:27:31 PM	Bubbler valve closed
12/14/2012	1:27:31 PM	Helium valve opened
12/14/2012	1:27:31 PM	Main Vac valve opened
12/14/2012	1:27:31 PM	Helium MFC set to  20.000000
12/14/2012	1:27:31 PM	H2 MFC set to  0.000000
12/14/2012	1:27:31 PM	BCl3 MFC set to  0.000000
12/14/2012	1:27:31 PM	PH3 MFC set to  0.000000
12/14/2012	1:27:31 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:27:31 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:27:31 PM	Tube furnace set to 0
12/14/2012	1:28:02 PM	Helium valve closed
12/14/2012	1:28:02 PM	H2 valve closed
12/14/2012	1:28:02 PM	BCl3 valve closed
12/14/2012	1:28:02 PM	PH3 valve closed
12/14/2012	1:28:02 PM	SiCl4 pre valve closed
12/14/2012	1:28:02 PM	SiCl4 post valve closed
12/14/2012	1:28:02 PM	Bypass valve closed
12/14/2012	1:28:02 PM	Bubbler valve closed
12/14/2012	1:28:02 PM	Main Vac valve opened
12/14/2012	1:28:02 PM	Helium MFC set to  0.000000
12/14/2012	1:28:02 PM	H2 MFC set to  0.000000
12/14/2012	1:28:02 PM	BCl3 MFC set to  0.000000
12/14/2012	1:28:02 PM	PH3 MFC set to  0.000000
12/14/2012	1:28:02 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:28:02 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:28:02 PM	Tube furnace set to 0
12/14/2012	1:28:32 PM	H2 valve closed
12/14/2012	1:28:32 PM	BCl3 valve closed
12/14/2012	1:28:32 PM	PH3 valve closed
12/14/2012	1:28:32 PM	SiCl4 pre valve closed
12/14/2012	1:28:32 PM	SiCl4 post valve closed
12/14/2012	1:28:32 PM	Bypass valve closed
12/14/2012	1:28:32 PM	Bubbler valve closed
12/14/2012	1:28:32 PM	Helium valve opened
12/14/2012	1:28:32 PM	Main Vac valve opened
12/14/2012	1:28:32 PM	Helium MFC set to  20.000000
12/14/2012	1:28:32 PM	H2 MFC set to  0.000000
12/14/2012	1:28:32 PM	BCl3 MFC set to  0.000000
12/14/2012	1:28:32 PM	PH3 MFC set to  0.000000
12/14/2012	1:28:32 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:28:32 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:28:32 PM	Tube furnace set to 0
12/14/2012	1:29:02 PM	Helium valve closed
12/14/2012	1:29:02 PM	H2 valve closed
12/14/2012	1:29:02 PM	BCl3 valve closed
12/14/2012	1:29:02 PM	PH3 valve closed
12/14/2012	1:29:02 PM	SiCl4 pre valve closed
12/14/2012	1:29:02 PM	SiCl4 post valve closed
12/14/2012	1:29:02 PM	Bypass valve closed
12/14/2012	1:29:02 PM	Bubbler valve closed
12/14/2012	1:29:02 PM	Main Vac valve opened
12/14/2012	1:29:02 PM	Helium MFC set to  0.000000
12/14/2012	1:29:02 PM	H2 MFC set to  0.000000
12/14/2012	1:29:02 PM	BCl3 MFC set to  0.000000
12/14/2012	1:29:02 PM	PH3 MFC set to  0.000000
12/14/2012	1:29:02 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:29:02 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:29:02 PM	Tube furnace set to 0
12/14/2012	1:29:32 PM	H2 valve closed
12/14/2012	1:29:32 PM	BCl3 valve closed
12/14/2012	1:29:32 PM	PH3 valve closed
12/14/2012	1:29:32 PM	SiCl4 pre valve closed
12/14/2012	1:29:32 PM	SiCl4 post valve closed
12/14/2012	1:29:32 PM	Bypass valve closed
12/14/2012	1:29:32 PM	Bubbler valve closed
12/14/2012	1:29:32 PM	Helium valve opened
12/14/2012	1:29:32 PM	Main Vac valve opened
12/14/2012	1:29:32 PM	Helium MFC set to  20.000000
12/14/2012	1:29:32 PM	H2 MFC set to  0.000000
12/14/2012	1:29:32 PM	BCl3 MFC set to  0.000000
12/14/2012	1:29:32 PM	PH3 MFC set to  0.000000
12/14/2012	1:29:32 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:29:32 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:29:32 PM	Tube furnace set to 0
12/14/2012	1:30:03 PM	Helium valve closed
12/14/2012	1:30:03 PM	H2 valve closed
12/14/2012	1:30:03 PM	BCl3 valve closed
12/14/2012	1:30:03 PM	PH3 valve closed
12/14/2012	1:30:03 PM	SiCl4 pre valve closed
12/14/2012	1:30:03 PM	SiCl4 post valve closed
12/14/2012	1:30:03 PM	Bypass valve closed
12/14/2012	1:30:03 PM	Bubbler valve closed
12/14/2012	1:30:03 PM	Main Vac valve opened
12/14/2012	1:30:03 PM	Helium MFC set to  0.000000
12/14/2012	1:30:03 PM	H2 MFC set to  0.000000
12/14/2012	1:30:03 PM	BCl3 MFC set to  0.000000
12/14/2012	1:30:03 PM	PH3 MFC set to  0.000000
12/14/2012	1:30:03 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:30:03 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:30:03 PM	Tube furnace set to 0
12/14/2012	1:30:33 PM	H2 valve closed
12/14/2012	1:30:33 PM	BCl3 valve closed
12/14/2012	1:30:33 PM	PH3 valve closed
12/14/2012	1:30:33 PM	SiCl4 pre valve closed
12/14/2012	1:30:33 PM	SiCl4 post valve closed
12/14/2012	1:30:33 PM	Bypass valve closed
12/14/2012	1:30:33 PM	Bubbler valve closed
12/14/2012	1:30:33 PM	Helium valve opened
12/14/2012	1:30:33 PM	Main Vac valve opened
12/14/2012	1:30:33 PM	Helium MFC set to  20.000000
12/14/2012	1:30:33 PM	H2 MFC set to  0.000000
12/14/2012	1:30:33 PM	BCl3 MFC set to  0.000000
12/14/2012	1:30:33 PM	PH3 MFC set to  0.000000
12/14/2012	1:30:33 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:30:33 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:30:33 PM	Tube furnace set to 0
12/14/2012	1:31:03 PM	Helium valve closed
12/14/2012	1:31:03 PM	H2 valve closed
12/14/2012	1:31:03 PM	BCl3 valve closed
12/14/2012	1:31:03 PM	PH3 valve closed
12/14/2012	1:31:03 PM	SiCl4 pre valve closed
12/14/2012	1:31:03 PM	SiCl4 post valve closed
12/14/2012	1:31:03 PM	Bypass valve closed
12/14/2012	1:31:03 PM	Bubbler valve closed
12/14/2012	1:31:03 PM	Main Vac valve opened
12/14/2012	1:31:03 PM	Helium MFC set to  0.000000
12/14/2012	1:31:03 PM	H2 MFC set to  0.000000
12/14/2012	1:31:03 PM	BCl3 MFC set to  0.000000
12/14/2012	1:31:03 PM	PH3 MFC set to  0.000000
12/14/2012	1:31:03 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:31:03 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:31:03 PM	Tube furnace set to 0
12/14/2012	1:31:33 PM	H2 valve closed
12/14/2012	1:31:33 PM	BCl3 valve closed
12/14/2012	1:31:33 PM	PH3 valve closed
12/14/2012	1:31:33 PM	SiCl4 pre valve closed
12/14/2012	1:31:33 PM	SiCl4 post valve closed
12/14/2012	1:31:33 PM	Bypass valve closed
12/14/2012	1:31:33 PM	Bubbler valve closed
12/14/2012	1:31:33 PM	Helium valve opened
12/14/2012	1:31:33 PM	Main Vac valve opened
12/14/2012	1:31:33 PM	Helium MFC set to  20.000000
12/14/2012	1:31:33 PM	H2 MFC set to  0.000000
12/14/2012	1:31:33 PM	BCl3 MFC set to  0.000000
12/14/2012	1:31:33 PM	PH3 MFC set to  0.000000
12/14/2012	1:31:33 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:31:33 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:31:33 PM	Tube furnace set to 0
12/14/2012	1:32:03 PM	Helium valve closed
12/14/2012	1:32:03 PM	H2 valve closed
12/14/2012	1:32:03 PM	BCl3 valve closed
12/14/2012	1:32:03 PM	PH3 valve closed
12/14/2012	1:32:04 PM	SiCl4 pre valve closed
12/14/2012	1:32:04 PM	SiCl4 post valve closed
12/14/2012	1:32:04 PM	Bypass valve closed
12/14/2012	1:32:04 PM	Bubbler valve closed
12/14/2012	1:32:04 PM	Main Vac valve opened
12/14/2012	1:32:04 PM	Helium MFC set to  0.000000
12/14/2012	1:32:04 PM	H2 MFC set to  0.000000
12/14/2012	1:32:04 PM	BCl3 MFC set to  0.000000
12/14/2012	1:32:04 PM	PH3 MFC set to  0.000000
12/14/2012	1:32:04 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:32:04 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:32:04 PM	Tube furnace set to 0
12/14/2012	1:32:34 PM	H2 valve closed
12/14/2012	1:32:34 PM	BCl3 valve closed
12/14/2012	1:32:34 PM	PH3 valve closed
12/14/2012	1:32:34 PM	SiCl4 pre valve closed
12/14/2012	1:32:34 PM	SiCl4 post valve closed
12/14/2012	1:32:34 PM	Bypass valve closed
12/14/2012	1:32:34 PM	Bubbler valve closed
12/14/2012	1:32:34 PM	Helium valve opened
12/14/2012	1:32:34 PM	Main Vac valve opened
12/14/2012	1:32:34 PM	Helium MFC set to  20.000000
12/14/2012	1:32:34 PM	H2 MFC set to  0.000000
12/14/2012	1:32:34 PM	BCl3 MFC set to  0.000000
12/14/2012	1:32:34 PM	PH3 MFC set to  0.000000
12/14/2012	1:32:34 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:32:34 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:32:34 PM	Tube furnace set to 0
12/14/2012	1:33:04 PM	Helium valve closed
12/14/2012	1:33:04 PM	H2 valve closed
12/14/2012	1:33:04 PM	BCl3 valve closed
12/14/2012	1:33:04 PM	PH3 valve closed
12/14/2012	1:33:04 PM	SiCl4 pre valve closed
12/14/2012	1:33:04 PM	SiCl4 post valve closed
12/14/2012	1:33:04 PM	Bypass valve closed
12/14/2012	1:33:04 PM	Bubbler valve closed
12/14/2012	1:33:04 PM	Main Vac valve opened
12/14/2012	1:33:04 PM	Helium MFC set to  0.000000
12/14/2012	1:33:04 PM	H2 MFC set to  0.000000
12/14/2012	1:33:04 PM	BCl3 MFC set to  0.000000
12/14/2012	1:33:04 PM	PH3 MFC set to  0.000000
12/14/2012	1:33:04 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:33:04 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:33:04 PM	Tube furnace set to 0
12/14/2012	1:33:34 PM	H2 valve closed
12/14/2012	1:33:34 PM	BCl3 valve closed
12/14/2012	1:33:34 PM	PH3 valve closed
12/14/2012	1:33:34 PM	SiCl4 pre valve closed
12/14/2012	1:33:34 PM	SiCl4 post valve closed
12/14/2012	1:33:34 PM	Bypass valve closed
12/14/2012	1:33:34 PM	Bubbler valve closed
12/14/2012	1:33:34 PM	Helium valve opened
12/14/2012	1:33:34 PM	Main Vac valve opened
12/14/2012	1:33:34 PM	Helium MFC set to  20.000000
12/14/2012	1:33:34 PM	H2 MFC set to  0.000000
12/14/2012	1:33:34 PM	BCl3 MFC set to  0.000000
12/14/2012	1:33:34 PM	PH3 MFC set to  0.000000
12/14/2012	1:33:34 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:33:34 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:33:34 PM	Tube furnace set to 0
12/14/2012	1:34:04 PM	Helium valve closed
12/14/2012	1:34:04 PM	H2 valve closed
12/14/2012	1:34:04 PM	BCl3 valve closed
12/14/2012	1:34:04 PM	PH3 valve closed
12/14/2012	1:34:04 PM	SiCl4 pre valve closed
12/14/2012	1:34:04 PM	SiCl4 post valve closed
12/14/2012	1:34:04 PM	Bypass valve closed
12/14/2012	1:34:04 PM	Bubbler valve closed
12/14/2012	1:34:05 PM	Main Vac valve opened
12/14/2012	1:34:05 PM	Helium MFC set to  0.000000
12/14/2012	1:34:05 PM	H2 MFC set to  0.000000
12/14/2012	1:34:05 PM	BCl3 MFC set to  0.000000
12/14/2012	1:34:05 PM	PH3 MFC set to  0.000000
12/14/2012	1:34:05 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:34:05 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:34:05 PM	Tube furnace set to 0
12/14/2012	1:34:35 PM	H2 valve closed
12/14/2012	1:34:35 PM	BCl3 valve closed
12/14/2012	1:34:35 PM	PH3 valve closed
12/14/2012	1:34:35 PM	SiCl4 pre valve closed
12/14/2012	1:34:35 PM	SiCl4 post valve closed
12/14/2012	1:34:35 PM	Bypass valve closed
12/14/2012	1:34:35 PM	Bubbler valve closed
12/14/2012	1:34:35 PM	Helium valve opened
12/14/2012	1:34:35 PM	Main Vac valve opened
12/14/2012	1:34:35 PM	Helium MFC set to  20.000000
12/14/2012	1:34:35 PM	H2 MFC set to  0.000000
12/14/2012	1:34:35 PM	BCl3 MFC set to  0.000000
12/14/2012	1:34:35 PM	PH3 MFC set to  0.000000
12/14/2012	1:34:35 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:34:35 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:34:35 PM	Tube furnace set to 0
12/14/2012	1:35:05 PM	Helium valve closed
12/14/2012	1:35:05 PM	H2 valve closed
12/14/2012	1:35:05 PM	BCl3 valve closed
12/14/2012	1:35:05 PM	PH3 valve closed
12/14/2012	1:35:05 PM	SiCl4 pre valve closed
12/14/2012	1:35:05 PM	SiCl4 post valve closed
12/14/2012	1:35:05 PM	Bypass valve closed
12/14/2012	1:35:05 PM	Bubbler valve closed
12/14/2012	1:35:05 PM	Main Vac valve opened
12/14/2012	1:35:05 PM	Helium MFC set to  0.000000
12/14/2012	1:35:05 PM	H2 MFC set to  0.000000
12/14/2012	1:35:05 PM	BCl3 MFC set to  0.000000
12/14/2012	1:35:05 PM	PH3 MFC set to  0.000000
12/14/2012	1:35:05 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:35:05 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:35:05 PM	Tube furnace set to 200
12/14/2012	1:35:35 PM	H2 valve closed
12/14/2012	1:35:35 PM	BCl3 valve closed
12/14/2012	1:35:35 PM	PH3 valve closed
12/14/2012	1:35:35 PM	SiCl4 pre valve closed
12/14/2012	1:35:35 PM	SiCl4 post valve closed
12/14/2012	1:35:35 PM	Bypass valve closed
12/14/2012	1:35:35 PM	Bubbler valve closed
12/14/2012	1:35:35 PM	Helium valve opened
12/14/2012	1:35:35 PM	Main Vac valve opened
12/14/2012	1:35:35 PM	Helium MFC set to  20.000000
12/14/2012	1:35:35 PM	H2 MFC set to  0.000000
12/14/2012	1:35:35 PM	BCl3 MFC set to  0.000000
12/14/2012	1:35:35 PM	PH3 MFC set to  0.000000
12/14/2012	1:35:35 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:35:35 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:35:35 PM	Tube furnace set to 200
12/14/2012	1:36:05 PM	Helium valve closed
12/14/2012	1:36:05 PM	H2 valve closed
12/14/2012	1:36:05 PM	BCl3 valve closed
12/14/2012	1:36:05 PM	PH3 valve closed
12/14/2012	1:36:05 PM	SiCl4 pre valve closed
12/14/2012	1:36:05 PM	SiCl4 post valve closed
12/14/2012	1:36:05 PM	Bypass valve closed
12/14/2012	1:36:05 PM	Bubbler valve closed
12/14/2012	1:36:05 PM	Main Vac valve opened
12/14/2012	1:36:06 PM	Helium MFC set to  0.000000
12/14/2012	1:36:06 PM	H2 MFC set to  0.000000
12/14/2012	1:36:06 PM	BCl3 MFC set to  0.000000
12/14/2012	1:36:06 PM	PH3 MFC set to  0.000000
12/14/2012	1:36:06 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:36:06 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:36:06 PM	Tube furnace set to 200
12/14/2012	1:36:36 PM	H2 valve closed
12/14/2012	1:36:36 PM	BCl3 valve closed
12/14/2012	1:36:36 PM	PH3 valve closed
12/14/2012	1:36:36 PM	SiCl4 pre valve closed
12/14/2012	1:36:36 PM	SiCl4 post valve closed
12/14/2012	1:36:36 PM	Bypass valve closed
12/14/2012	1:36:36 PM	Bubbler valve closed
12/14/2012	1:36:36 PM	Helium valve opened
12/14/2012	1:36:36 PM	Main Vac valve opened
12/14/2012	1:36:36 PM	Helium MFC set to  20.000000
12/14/2012	1:36:36 PM	H2 MFC set to  0.000000
12/14/2012	1:36:36 PM	BCl3 MFC set to  0.000000
12/14/2012	1:36:36 PM	PH3 MFC set to  0.000000
12/14/2012	1:36:36 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:36:36 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:36:36 PM	Tube furnace set to 200
12/14/2012	1:37:06 PM	Helium valve closed
12/14/2012	1:37:06 PM	H2 valve closed
12/14/2012	1:37:06 PM	BCl3 valve closed
12/14/2012	1:37:06 PM	PH3 valve closed
12/14/2012	1:37:06 PM	SiCl4 pre valve closed
12/14/2012	1:37:06 PM	SiCl4 post valve closed
12/14/2012	1:37:06 PM	Bypass valve closed
12/14/2012	1:37:06 PM	Bubbler valve closed
12/14/2012	1:37:06 PM	Main Vac valve opened
12/14/2012	1:37:06 PM	Helium MFC set to  0.000000
12/14/2012	1:37:06 PM	H2 MFC set to  0.000000
12/14/2012	1:37:06 PM	BCl3 MFC set to  0.000000
12/14/2012	1:37:06 PM	PH3 MFC set to  0.000000
12/14/2012	1:37:06 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:37:06 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:37:06 PM	Tube furnace set to 200
12/14/2012	1:37:36 PM	H2 valve closed
12/14/2012	1:37:36 PM	BCl3 valve closed
12/14/2012	1:37:36 PM	PH3 valve closed
12/14/2012	1:37:36 PM	SiCl4 pre valve closed
12/14/2012	1:37:36 PM	SiCl4 post valve closed
12/14/2012	1:37:36 PM	Bypass valve closed
12/14/2012	1:37:36 PM	Bubbler valve closed
12/14/2012	1:37:36 PM	Helium valve opened
12/14/2012	1:37:36 PM	Main Vac valve opened
12/14/2012	1:37:36 PM	Helium MFC set to  20.000000
12/14/2012	1:37:36 PM	H2 MFC set to  0.000000
12/14/2012	1:37:36 PM	BCl3 MFC set to  0.000000
12/14/2012	1:37:36 PM	PH3 MFC set to  0.000000
12/14/2012	1:37:36 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:37:36 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:37:36 PM	Tube furnace set to 200
12/14/2012	1:38:06 PM	Helium valve closed
12/14/2012	1:38:06 PM	H2 valve closed
12/14/2012	1:38:06 PM	BCl3 valve closed
12/14/2012	1:38:06 PM	PH3 valve closed
12/14/2012	1:38:06 PM	SiCl4 pre valve closed
12/14/2012	1:38:06 PM	SiCl4 post valve closed
12/14/2012	1:38:06 PM	Bypass valve closed
12/14/2012	1:38:06 PM	Bubbler valve closed
12/14/2012	1:38:06 PM	Main Vac valve opened
12/14/2012	1:38:06 PM	Helium MFC set to  0.000000
12/14/2012	1:38:06 PM	H2 MFC set to  0.000000
12/14/2012	1:38:06 PM	BCl3 MFC set to  0.000000
12/14/2012	1:38:06 PM	PH3 MFC set to  0.000000
12/14/2012	1:38:06 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:38:07 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:38:07 PM	Tube furnace set to 200
12/14/2012	1:38:37 PM	H2 valve closed
12/14/2012	1:38:37 PM	BCl3 valve closed
12/14/2012	1:38:37 PM	PH3 valve closed
12/14/2012	1:38:37 PM	SiCl4 pre valve closed
12/14/2012	1:38:37 PM	SiCl4 post valve closed
12/14/2012	1:38:37 PM	Bypass valve closed
12/14/2012	1:38:37 PM	Bubbler valve closed
12/14/2012	1:38:37 PM	Helium valve opened
12/14/2012	1:38:37 PM	Main Vac valve opened
12/14/2012	1:38:37 PM	Helium MFC set to  20.000000
12/14/2012	1:38:37 PM	H2 MFC set to  0.000000
12/14/2012	1:38:37 PM	BCl3 MFC set to  0.000000
12/14/2012	1:38:37 PM	PH3 MFC set to  0.000000
12/14/2012	1:38:37 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:38:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:38:37 PM	Tube furnace set to 200
12/14/2012	1:39:07 PM	Helium valve closed
12/14/2012	1:39:07 PM	H2 valve closed
12/14/2012	1:39:07 PM	BCl3 valve closed
12/14/2012	1:39:07 PM	PH3 valve closed
12/14/2012	1:39:07 PM	SiCl4 pre valve closed
12/14/2012	1:39:07 PM	SiCl4 post valve closed
12/14/2012	1:39:07 PM	Bypass valve closed
12/14/2012	1:39:07 PM	Bubbler valve closed
12/14/2012	1:39:07 PM	Main Vac valve opened
12/14/2012	1:39:07 PM	Helium MFC set to  0.000000
12/14/2012	1:39:07 PM	H2 MFC set to  0.000000
12/14/2012	1:39:07 PM	BCl3 MFC set to  0.000000
12/14/2012	1:39:07 PM	PH3 MFC set to  0.000000
12/14/2012	1:39:07 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:39:07 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:39:07 PM	Tube furnace set to 200
12/14/2012	1:39:37 PM	H2 valve closed
12/14/2012	1:39:37 PM	BCl3 valve closed
12/14/2012	1:39:37 PM	PH3 valve closed
12/14/2012	1:39:37 PM	SiCl4 pre valve closed
12/14/2012	1:39:37 PM	SiCl4 post valve closed
12/14/2012	1:39:37 PM	Bypass valve closed
12/14/2012	1:39:37 PM	Bubbler valve closed
12/14/2012	1:39:37 PM	Helium valve opened
12/14/2012	1:39:37 PM	Main Vac valve opened
12/14/2012	1:39:37 PM	Helium MFC set to  20.000000
12/14/2012	1:39:37 PM	H2 MFC set to  0.000000
12/14/2012	1:39:37 PM	BCl3 MFC set to  0.000000
12/14/2012	1:39:37 PM	PH3 MFC set to  0.000000
12/14/2012	1:39:37 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:39:37 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:39:37 PM	Tube furnace set to 200
12/14/2012	1:40:07 PM	Helium valve closed
12/14/2012	1:40:07 PM	H2 valve closed
12/14/2012	1:40:07 PM	BCl3 valve closed
12/14/2012	1:40:07 PM	PH3 valve closed
12/14/2012	1:40:07 PM	SiCl4 pre valve closed
12/14/2012	1:40:07 PM	SiCl4 post valve closed
12/14/2012	1:40:07 PM	Bypass valve closed
12/14/2012	1:40:07 PM	Bubbler valve closed
12/14/2012	1:40:07 PM	Main Vac valve opened
12/14/2012	1:40:07 PM	Helium MFC set to  0.000000
12/14/2012	1:40:07 PM	H2 MFC set to  0.000000
12/14/2012	1:40:07 PM	BCl3 MFC set to  0.000000
12/14/2012	1:40:07 PM	PH3 MFC set to  0.000000
12/14/2012	1:40:07 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:40:07 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:40:08 PM	Tube furnace set to 200
12/14/2012	1:40:38 PM	H2 valve closed
12/14/2012	1:40:38 PM	BCl3 valve closed
12/14/2012	1:40:38 PM	PH3 valve closed
12/14/2012	1:40:38 PM	SiCl4 pre valve closed
12/14/2012	1:40:38 PM	SiCl4 post valve closed
12/14/2012	1:40:38 PM	Bypass valve closed
12/14/2012	1:40:38 PM	Bubbler valve closed
12/14/2012	1:40:38 PM	Helium valve opened
12/14/2012	1:40:38 PM	Main Vac valve opened
12/14/2012	1:40:38 PM	Helium MFC set to  20.000000
12/14/2012	1:40:38 PM	H2 MFC set to  0.000000
12/14/2012	1:40:38 PM	BCl3 MFC set to  0.000000
12/14/2012	1:40:38 PM	PH3 MFC set to  0.000000
12/14/2012	1:40:38 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:40:38 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:40:38 PM	Tube furnace set to 200
12/14/2012	1:41:08 PM	Helium valve closed
12/14/2012	1:41:08 PM	H2 valve closed
12/14/2012	1:41:08 PM	BCl3 valve closed
12/14/2012	1:41:08 PM	PH3 valve closed
12/14/2012	1:41:08 PM	SiCl4 pre valve closed
12/14/2012	1:41:08 PM	SiCl4 post valve closed
12/14/2012	1:41:08 PM	Bypass valve closed
12/14/2012	1:41:08 PM	Bubbler valve closed
12/14/2012	1:41:08 PM	Main Vac valve opened
12/14/2012	1:41:08 PM	Helium MFC set to  0.000000
12/14/2012	1:41:08 PM	H2 MFC set to  0.000000
12/14/2012	1:41:08 PM	BCl3 MFC set to  0.000000
12/14/2012	1:41:08 PM	PH3 MFC set to  0.000000
12/14/2012	1:41:08 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:41:08 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:41:08 PM	Tube furnace set to 0
12/14/2012	1:41:09 PM	Run finished at 1:41 PM
12/14/2012	1:48:50 PM	Main Vac valve closed
12/14/2012	1:49:01 PM	Main Vac valve opened
12/14/2012	1:49:35 PM	Main Vac valve closed
12/14/2012	1:49:45 PM	Main Vac valve opened
12/14/2012	1:52:40 PM	Recipe started at 1:52 PM
12/14/2012	1:52:40 PM	Helium valve closed
12/14/2012	1:52:40 PM	H2 valve closed
12/14/2012	1:52:40 PM	BCl3 valve closed
12/14/2012	1:52:40 PM	PH3 valve closed
12/14/2012	1:52:40 PM	SiCl4 pre valve closed
12/14/2012	1:52:40 PM	SiCl4 post valve closed
12/14/2012	1:52:40 PM	Bypass valve closed
12/14/2012	1:52:40 PM	Bubbler valve closed
12/14/2012	1:52:40 PM	Main Vac valve opened
12/14/2012	1:52:40 PM	Helium MFC set to  0.000000
12/14/2012	1:52:40 PM	H2 MFC set to  0.000000
12/14/2012	1:52:40 PM	BCl3 MFC set to  0.000000
12/14/2012	1:52:40 PM	PH3 MFC set to  0.000000
12/14/2012	1:52:40 PM	SiCl4 MFC set to  0.000000
12/14/2012	1:52:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	1:52:41 PM	Tube furnace set to 0
12/14/2012	2:22:40 PM	Helium valve closed
12/14/2012	2:22:40 PM	H2 valve closed
12/14/2012	2:22:40 PM	BCl3 valve closed
12/14/2012	2:22:40 PM	PH3 valve closed
12/14/2012	2:22:41 PM	SiCl4 pre valve closed
12/14/2012	2:22:41 PM	SiCl4 post valve closed
12/14/2012	2:22:41 PM	Main Vac valve closed
12/14/2012	2:22:41 PM	Bypass valve closed
12/14/2012	2:22:41 PM	Bubbler valve closed
12/14/2012	2:22:41 PM	Helium MFC set to  0.000000
12/14/2012	2:22:41 PM	H2 MFC set to  0.000000
12/14/2012	2:22:41 PM	BCl3 MFC set to  0.000000
12/14/2012	2:22:41 PM	PH3 MFC set to  0.000000
12/14/2012	2:22:41 PM	SiCl4 MFC set to  0.000000
12/14/2012	2:22:41 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:22:41 PM	Tube furnace set to 0
12/14/2012	2:22:44 PM	Helium valve closed
12/14/2012	2:22:44 PM	BCl3 valve closed
12/14/2012	2:22:44 PM	PH3 valve closed
12/14/2012	2:22:44 PM	SiCl4 pre valve closed
12/14/2012	2:22:44 PM	SiCl4 post valve closed
12/14/2012	2:22:44 PM	Main Vac valve closed
12/14/2012	2:22:44 PM	Bypass valve closed
12/14/2012	2:22:44 PM	Bubbler valve closed
12/14/2012	2:22:44 PM	H2 valve opened
12/14/2012	2:22:44 PM	Helium MFC set to  0.000000
12/14/2012	2:22:44 PM	H2 MFC set to  500.000000
12/14/2012	2:22:44 PM	BCl3 MFC set to  0.000000
12/14/2012	2:22:44 PM	PH3 MFC set to  0.000000
12/14/2012	2:22:44 PM	SiCl4 MFC set to  0.000000
12/14/2012	2:22:44 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:22:44 PM	Tube furnace set to 0
12/14/2012	2:23:57 PM	Helium valve closed
12/14/2012	2:23:57 PM	BCl3 valve closed
12/14/2012	2:23:57 PM	PH3 valve closed
12/14/2012	2:23:57 PM	SiCl4 pre valve closed
12/14/2012	2:23:57 PM	SiCl4 post valve closed
12/14/2012	2:23:57 PM	Main Vac valve closed
12/14/2012	2:23:57 PM	Bypass valve closed
12/14/2012	2:23:57 PM	H2 valve opened
12/14/2012	2:23:57 PM	Bubbler valve opened
12/14/2012	2:23:57 PM	Helium MFC set to  0.000000
12/14/2012	2:23:57 PM	H2 MFC set to  500.000000
12/14/2012	2:23:57 PM	BCl3 MFC set to  0.000000
12/14/2012	2:23:57 PM	PH3 MFC set to  0.000000
12/14/2012	2:23:57 PM	SiCl4 MFC set to  0.000000
12/14/2012	2:23:57 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:23:57 PM	Tube furnace set to 0
12/14/2012	2:23:58 PM	Helium valve closed
12/14/2012	2:23:58 PM	BCl3 valve closed
12/14/2012	2:23:58 PM	PH3 valve closed
12/14/2012	2:23:58 PM	SiCl4 pre valve closed
12/14/2012	2:23:58 PM	SiCl4 post valve closed
12/14/2012	2:23:58 PM	Main Vac valve closed
12/14/2012	2:23:58 PM	Bypass valve closed
12/14/2012	2:23:58 PM	H2 valve opened
12/14/2012	2:23:58 PM	Bubbler valve opened
12/14/2012	2:23:58 PM	Helium MFC set to  0.000000
12/14/2012	2:23:58 PM	H2 MFC set to  500.000000
12/14/2012	2:23:58 PM	BCl3 MFC set to  0.000000
12/14/2012	2:23:58 PM	PH3 MFC set to  0.000000
12/14/2012	2:23:58 PM	SiCl4 MFC set to  0.000000
12/14/2012	2:23:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:23:58 PM	Tube furnace set to 1000
12/14/2012	2:43:58 PM	Helium valve closed
12/14/2012	2:43:58 PM	PH3 valve closed
12/14/2012	2:43:58 PM	Main Vac valve closed
12/14/2012	2:43:58 PM	Bypass valve closed
12/14/2012	2:43:58 PM	H2 valve opened
12/14/2012	2:43:58 PM	BCl3 valve opened
12/14/2012	2:43:58 PM	SiCl4 pre valve opened
12/14/2012	2:43:58 PM	SiCl4 post valve opened
12/14/2012	2:43:58 PM	Bubbler valve opened
12/14/2012	2:43:58 PM	Helium MFC set to  0.000000
12/14/2012	2:43:58 PM	H2 MFC set to  450.000000
12/14/2012	2:43:58 PM	BCl3 MFC set to  20.000000
12/14/2012	2:43:58 PM	PH3 MFC set to  0.000000
12/14/2012	2:43:58 PM	SiCl4 MFC set to  50.000000
12/14/2012	2:43:58 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:43:59 PM	Tube furnace set to 1000
12/14/2012	2:48:59 PM	Helium valve closed
12/14/2012	2:48:59 PM	PH3 valve closed
12/14/2012	2:48:59 PM	Main Vac valve closed
12/14/2012	2:48:59 PM	Bypass valve closed
12/14/2012	2:48:59 PM	H2 valve opened
12/14/2012	2:48:59 PM	BCl3 valve opened
12/14/2012	2:48:59 PM	SiCl4 pre valve opened
12/14/2012	2:48:59 PM	SiCl4 post valve opened
12/14/2012	2:48:59 PM	Bubbler valve opened
12/14/2012	2:48:59 PM	Helium MFC set to  0.000000
12/14/2012	2:48:59 PM	H2 MFC set to  450.000000
12/14/2012	2:48:59 PM	BCl3 MFC set to  0.750000
12/14/2012	2:48:59 PM	PH3 MFC set to  0.000000
12/14/2012	2:48:59 PM	SiCl4 MFC set to  50.000000
12/14/2012	2:48:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	2:48:59 PM	Tube furnace set to 1000
12/14/2012	3:33:59 PM	Helium valve closed
12/14/2012	3:33:59 PM	BCl3 valve closed
12/14/2012	3:33:59 PM	Main Vac valve closed
12/14/2012	3:33:59 PM	Bypass valve closed
12/14/2012	3:33:59 PM	H2 valve opened
12/14/2012	3:33:59 PM	PH3 valve opened
12/14/2012	3:33:59 PM	SiCl4 pre valve opened
12/14/2012	3:33:59 PM	SiCl4 post valve opened
12/14/2012	3:33:59 PM	Bubbler valve opened
12/14/2012	3:33:59 PM	Helium MFC set to  0.000000
12/14/2012	3:33:59 PM	H2 MFC set to  450.000000
12/14/2012	3:33:59 PM	BCl3 MFC set to  0.000000
12/14/2012	3:33:59 PM	PH3 MFC set to  3.000000
12/14/2012	3:33:59 PM	SiCl4 MFC set to  50.000000
12/14/2012	3:33:59 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:33:59 PM	Tube furnace set to 1000
12/14/2012	3:34:19 PM	Helium valve closed
12/14/2012	3:34:19 PM	BCl3 valve closed
12/14/2012	3:34:19 PM	Main Vac valve closed
12/14/2012	3:34:19 PM	Bypass valve closed
12/14/2012	3:34:19 PM	H2 valve opened
12/14/2012	3:34:19 PM	PH3 valve opened
12/14/2012	3:34:19 PM	SiCl4 pre valve opened
12/14/2012	3:34:19 PM	SiCl4 post valve opened
12/14/2012	3:34:19 PM	Bubbler valve opened
12/14/2012	3:34:19 PM	Helium MFC set to  0.000000
12/14/2012	3:34:19 PM	H2 MFC set to  450.000000
12/14/2012	3:34:19 PM	BCl3 MFC set to  0.000000
12/14/2012	3:34:19 PM	PH3 MFC set to  20.000000
12/14/2012	3:34:19 PM	SiCl4 MFC set to  50.000000
12/14/2012	3:34:19 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:34:19 PM	Tube furnace set to 1000
12/14/2012	3:34:39 PM	Helium valve closed
12/14/2012	3:34:39 PM	BCl3 valve closed
12/14/2012	3:34:39 PM	PH3 valve closed
12/14/2012	3:34:39 PM	SiCl4 pre valve closed
12/14/2012	3:34:39 PM	SiCl4 post valve closed
12/14/2012	3:34:39 PM	Main Vac valve closed
12/14/2012	3:34:39 PM	Bypass valve closed
12/14/2012	3:34:39 PM	H2 valve opened
12/14/2012	3:34:39 PM	Bubbler valve opened
12/14/2012	3:34:39 PM	Helium MFC set to  0.000000
12/14/2012	3:34:39 PM	H2 MFC set to  500.000000
12/14/2012	3:34:39 PM	BCl3 MFC set to  0.000000
12/14/2012	3:34:39 PM	PH3 MFC set to  0.000000
12/14/2012	3:34:39 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:34:39 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:34:39 PM	Tube furnace set to 950
12/14/2012	3:36:39 PM	Helium valve closed
12/14/2012	3:36:39 PM	BCl3 valve closed
12/14/2012	3:36:39 PM	PH3 valve closed
12/14/2012	3:36:40 PM	SiCl4 pre valve closed
12/14/2012	3:36:40 PM	SiCl4 post valve closed
12/14/2012	3:36:40 PM	Main Vac valve closed
12/14/2012	3:36:40 PM	Bypass valve closed
12/14/2012	3:36:40 PM	H2 valve opened
12/14/2012	3:36:40 PM	Bubbler valve opened
12/14/2012	3:36:40 PM	Helium MFC set to  0.000000
12/14/2012	3:36:40 PM	H2 MFC set to  500.000000
12/14/2012	3:36:40 PM	BCl3 MFC set to  0.000000
12/14/2012	3:36:40 PM	PH3 MFC set to  0.000000
12/14/2012	3:36:40 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:36:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:36:40 PM	Tube furnace set to 900
12/14/2012	3:38:40 PM	Helium valve closed
12/14/2012	3:38:40 PM	BCl3 valve closed
12/14/2012	3:38:40 PM	PH3 valve closed
12/14/2012	3:38:40 PM	SiCl4 pre valve closed
12/14/2012	3:38:40 PM	SiCl4 post valve closed
12/14/2012	3:38:40 PM	Main Vac valve closed
12/14/2012	3:38:40 PM	Bypass valve closed
12/14/2012	3:38:40 PM	H2 valve opened
12/14/2012	3:38:40 PM	Bubbler valve opened
12/14/2012	3:38:40 PM	Helium MFC set to  0.000000
12/14/2012	3:38:40 PM	H2 MFC set to  500.000000
12/14/2012	3:38:40 PM	BCl3 MFC set to  0.000000
12/14/2012	3:38:40 PM	PH3 MFC set to  0.000000
12/14/2012	3:38:40 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:38:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:38:40 PM	Tube furnace set to 850
12/14/2012	3:40:40 PM	H2 valve closed
12/14/2012	3:40:40 PM	BCl3 valve closed
12/14/2012	3:40:40 PM	PH3 valve closed
12/14/2012	3:40:40 PM	SiCl4 pre valve closed
12/14/2012	3:40:40 PM	SiCl4 post valve closed
12/14/2012	3:40:40 PM	Main Vac valve closed
12/14/2012	3:40:40 PM	Bypass valve closed
12/14/2012	3:40:40 PM	Helium valve opened
12/14/2012	3:40:40 PM	Bubbler valve opened
12/14/2012	3:40:40 PM	Helium MFC set to  500.000000
12/14/2012	3:40:40 PM	H2 MFC set to  0.000000
12/14/2012	3:40:40 PM	BCl3 MFC set to  0.000000
12/14/2012	3:40:40 PM	PH3 MFC set to  0.000000
12/14/2012	3:40:40 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:40:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:40:40 PM	Tube furnace set to 800
12/14/2012	3:42:40 PM	H2 valve closed
12/14/2012	3:42:40 PM	BCl3 valve closed
12/14/2012	3:42:40 PM	PH3 valve closed
12/14/2012	3:42:40 PM	SiCl4 pre valve closed
12/14/2012	3:42:40 PM	SiCl4 post valve closed
12/14/2012	3:42:40 PM	Main Vac valve closed
12/14/2012	3:42:40 PM	Bypass valve closed
12/14/2012	3:42:40 PM	Helium valve opened
12/14/2012	3:42:40 PM	Bubbler valve opened
12/14/2012	3:42:40 PM	Helium MFC set to  500.000000
12/14/2012	3:42:40 PM	H2 MFC set to  0.000000
12/14/2012	3:42:40 PM	BCl3 MFC set to  0.000000
12/14/2012	3:42:40 PM	PH3 MFC set to  0.000000
12/14/2012	3:42:40 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:42:40 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:42:40 PM	Tube furnace set to 750
12/14/2012	3:44:40 PM	H2 valve closed
12/14/2012	3:44:40 PM	BCl3 valve closed
12/14/2012	3:44:40 PM	PH3 valve closed
12/14/2012	3:44:40 PM	SiCl4 pre valve closed
12/14/2012	3:44:40 PM	SiCl4 post valve closed
12/14/2012	3:44:40 PM	Main Vac valve closed
12/14/2012	3:44:40 PM	Bypass valve closed
12/14/2012	3:44:40 PM	Helium valve opened
12/14/2012	3:44:40 PM	Bubbler valve opened
12/14/2012	3:44:41 PM	Helium MFC set to  500.000000
12/14/2012	3:44:41 PM	H2 MFC set to  0.000000
12/14/2012	3:44:41 PM	BCl3 MFC set to  0.000000
12/14/2012	3:44:41 PM	PH3 MFC set to  0.000000
12/14/2012	3:44:41 PM	SiCl4 MFC set to  0.000000
12/14/2012	3:44:41 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	3:44:41 PM	Tube furnace set to 0
12/14/2012	4:04:41 PM	Helium valve closed
12/14/2012	4:04:41 PM	H2 valve closed
12/14/2012	4:04:41 PM	BCl3 valve closed
12/14/2012	4:04:41 PM	PH3 valve closed
12/14/2012	4:04:41 PM	SiCl4 pre valve closed
12/14/2012	4:04:41 PM	SiCl4 post valve closed
12/14/2012	4:04:41 PM	Main Vac valve closed
12/14/2012	4:04:41 PM	Bypass valve closed
12/14/2012	4:04:41 PM	Bubbler valve closed
12/14/2012	4:04:41 PM	Helium MFC set to  0.000000
12/14/2012	4:04:41 PM	H2 MFC set to  0.000000
12/14/2012	4:04:41 PM	BCl3 MFC set to  0.000000
12/14/2012	4:04:41 PM	PH3 MFC set to  0.000000
12/14/2012	4:04:41 PM	SiCl4 MFC set to  0.000000
12/14/2012	4:04:41 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	4:04:41 PM	Tube furnace set to 0
12/14/2012	4:04:42 PM	Helium valve closed
12/14/2012	4:04:42 PM	H2 valve closed
12/14/2012	4:04:42 PM	BCl3 valve closed
12/14/2012	4:04:42 PM	PH3 valve closed
12/14/2012	4:04:42 PM	SiCl4 pre valve closed
12/14/2012	4:04:42 PM	SiCl4 post valve closed
12/14/2012	4:04:42 PM	Main Vac valve closed
12/14/2012	4:04:42 PM	Bubbler valve closed
12/14/2012	4:04:42 PM	Bypass valve opened
12/14/2012	4:04:42 PM	Helium MFC set to  0.000000
12/14/2012	4:04:42 PM	H2 MFC set to  0.000000
12/14/2012	4:04:42 PM	BCl3 MFC set to  0.000000
12/14/2012	4:04:42 PM	PH3 MFC set to  0.000000
12/14/2012	4:04:42 PM	SiCl4 MFC set to  0.000000
12/14/2012	4:04:42 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	4:04:42 PM	Tube furnace set to 0
12/14/2012	4:05:54 PM	Helium valve closed
12/14/2012	4:05:54 PM	H2 valve closed
12/14/2012	4:05:54 PM	BCl3 valve closed
12/14/2012	4:05:54 PM	PH3 valve closed
12/14/2012	4:05:54 PM	SiCl4 pre valve closed
12/14/2012	4:05:54 PM	SiCl4 post valve closed
12/14/2012	4:05:54 PM	Main Vac valve closed
12/14/2012	4:05:54 PM	Bubbler valve closed
12/14/2012	4:05:54 PM	Bypass valve opened
12/14/2012	4:05:54 PM	Helium MFC set to  0.000000
12/14/2012	4:05:54 PM	H2 MFC set to  0.000000
12/14/2012	4:05:54 PM	BCl3 MFC set to  0.000000
12/14/2012	4:05:54 PM	PH3 MFC set to  0.000000
12/14/2012	4:05:54 PM	SiCl4 MFC set to  0.000000
12/14/2012	4:05:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	4:05:54 PM	Tube furnace set to 0
12/14/2012	4:06:54 PM	Helium valve closed
12/14/2012	4:06:54 PM	H2 valve closed
12/14/2012	4:06:54 PM	BCl3 valve closed
12/14/2012	4:06:54 PM	PH3 valve closed
12/14/2012	4:06:54 PM	SiCl4 pre valve closed
12/14/2012	4:06:54 PM	SiCl4 post valve closed
12/14/2012	4:06:54 PM	Bypass valve closed
12/14/2012	4:06:54 PM	Bubbler valve closed
12/14/2012	4:06:54 PM	Main Vac valve opened
12/14/2012	4:06:54 PM	Helium MFC set to  0.000000
12/14/2012	4:06:54 PM	H2 MFC set to  0.000000
12/14/2012	4:06:54 PM	BCl3 MFC set to  0.000000
12/14/2012	4:06:54 PM	PH3 MFC set to  0.000000
12/14/2012	4:06:54 PM	SiCl4 MFC set to  0.000000
12/14/2012	4:06:54 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	4:06:54 PM	Tube furnace set to 0
12/14/2012	4:06:55 PM	Run finished at 4:06 PM
12/14/2012	10:06:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	10:06:13 PM	Recipe started at 10:06 PM
12/14/2012	10:06:13 PM	Helium valve closed
12/14/2012	10:06:13 PM	H2 valve closed
12/14/2012	10:06:13 PM	BCl3 valve closed
12/14/2012	10:06:13 PM	PH3 valve closed
12/14/2012	10:06:13 PM	SiCl4 pre valve closed
12/14/2012	10:06:13 PM	SiCl4 post valve closed
12/14/2012	10:06:13 PM	Main Vac valve closed
12/14/2012	10:06:13 PM	Bypass valve closed
12/14/2012	10:06:13 PM	Bubbler valve closed
12/14/2012	10:06:13 PM	Helium MFC set to  0.000000
12/14/2012	10:06:13 PM	H2 MFC set to  0.000000
12/14/2012	10:06:13 PM	BCl3 MFC set to  0.000000
12/14/2012	10:06:13 PM	PH3 MFC set to  0.000000
12/14/2012	10:06:13 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:06:13 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:06:13 PM	Tube furnace set to 0
12/14/2012	10:06:16 PM	H2 valve closed
12/14/2012	10:06:16 PM	BCl3 valve closed
12/14/2012	10:06:16 PM	PH3 valve closed
12/14/2012	10:06:16 PM	SiCl4 pre valve closed
12/14/2012	10:06:16 PM	SiCl4 post valve closed
12/14/2012	10:06:16 PM	Main Vac valve closed
12/14/2012	10:06:16 PM	Bypass valve closed
12/14/2012	10:06:16 PM	Bubbler valve closed
12/14/2012	10:06:16 PM	Helium valve opened
12/14/2012	10:06:16 PM	Helium MFC set to  500.000000
12/14/2012	10:06:16 PM	H2 MFC set to  0.000000
12/14/2012	10:06:16 PM	BCl3 MFC set to  0.000000
12/14/2012	10:06:16 PM	PH3 MFC set to  0.000000
12/14/2012	10:06:16 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:06:16 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:06:17 PM	Tube furnace set to 0
12/14/2012	10:07:30 PM	Helium valve closed
12/14/2012	10:07:30 PM	H2 valve closed
12/14/2012	10:07:30 PM	BCl3 valve closed
12/14/2012	10:07:30 PM	PH3 valve closed
12/14/2012	10:07:30 PM	SiCl4 pre valve closed
12/14/2012	10:07:30 PM	SiCl4 post valve closed
12/14/2012	10:07:30 PM	Main Vac valve closed
12/14/2012	10:07:30 PM	Bypass valve closed
12/14/2012	10:07:30 PM	Bubbler valve closed
12/14/2012	10:07:30 PM	Helium MFC set to  0.000000
12/14/2012	10:07:30 PM	H2 MFC set to  0.000000
12/14/2012	10:07:30 PM	BCl3 MFC set to  0.000000
12/14/2012	10:07:30 PM	PH3 MFC set to  0.000000
12/14/2012	10:07:30 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:07:30 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:07:30 PM	Tube furnace set to 0
12/14/2012	10:07:31 PM	Run finished at 10:07 PM
12/14/2012	10:07:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/14/2012	10:10:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/14/2012	10:10:52 PM	Recipe started at 10:10 PM
12/14/2012	10:10:52 PM	Helium valve closed
12/14/2012	10:10:52 PM	H2 valve closed
12/14/2012	10:10:52 PM	BCl3 valve closed
12/14/2012	10:10:52 PM	PH3 valve closed
12/14/2012	10:10:52 PM	SiCl4 pre valve closed
12/14/2012	10:10:52 PM	SiCl4 post valve closed
12/14/2012	10:10:52 PM	Main Vac valve closed
12/14/2012	10:10:52 PM	Bubbler valve closed
12/14/2012	10:10:52 PM	Bypass valve opened
12/14/2012	10:10:52 PM	Helium MFC set to  0.000000
12/14/2012	10:10:52 PM	H2 MFC set to  0.000000
12/14/2012	10:10:52 PM	BCl3 MFC set to  0.000000
12/14/2012	10:10:52 PM	PH3 MFC set to  0.000000
12/14/2012	10:10:52 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:10:52 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:10:52 PM	Tube furnace set to 0
12/14/2012	10:12:21 PM	Helium valve closed
12/14/2012	10:12:21 PM	H2 valve closed
12/14/2012	10:12:21 PM	BCl3 valve closed
12/14/2012	10:12:21 PM	PH3 valve closed
12/14/2012	10:12:21 PM	SiCl4 pre valve closed
12/14/2012	10:12:21 PM	SiCl4 post valve closed
12/14/2012	10:12:21 PM	Main Vac valve closed
12/14/2012	10:12:21 PM	Bubbler valve closed
12/14/2012	10:12:21 PM	Bypass valve opened
12/14/2012	10:12:21 PM	Helium MFC set to  0.000000
12/14/2012	10:12:21 PM	H2 MFC set to  0.000000
12/14/2012	10:12:21 PM	BCl3 MFC set to  0.000000
12/14/2012	10:12:21 PM	PH3 MFC set to  0.000000
12/14/2012	10:12:21 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:12:21 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:12:21 PM	Tube furnace set to 0
12/14/2012	10:12:33 PM	Helium valve closed
12/14/2012	10:12:33 PM	H2 valve closed
12/14/2012	10:12:33 PM	BCl3 valve closed
12/14/2012	10:12:33 PM	PH3 valve closed
12/14/2012	10:12:33 PM	SiCl4 pre valve closed
12/14/2012	10:12:33 PM	SiCl4 post valve closed
12/14/2012	10:12:33 PM	Bypass valve closed
12/14/2012	10:12:33 PM	Bubbler valve closed
12/14/2012	10:12:33 PM	Main Vac valve opened
12/14/2012	10:12:33 PM	Helium MFC set to  0.000000
12/14/2012	10:12:33 PM	H2 MFC set to  0.000000
12/14/2012	10:12:33 PM	BCl3 MFC set to  0.000000
12/14/2012	10:12:33 PM	PH3 MFC set to  0.000000
12/14/2012	10:12:33 PM	SiCl4 MFC set to  0.000000
12/14/2012	10:12:33 PM	Bypass solenoid MFC set to  0.000000
12/14/2012	10:12:33 PM	Tube furnace set to 0
12/14/2012	10:12:34 PM	Run finished at 10:12 PM
12/14/2012	10:12:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
